Impedance spectroscopy on WO3 gas sensor

Sensors and Actuators, B: Chemical

Volumn 106, Issue 2, 2005, Pages 713-718

  Labidi, A ^a,b   Jacolin, C ^a   Bendahan, M ^a   Abdelghani, A ^b   Guerin J ^a   Aguir, K ^a   Maaref, M ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b UNIVERSITÉ DE CARTHAGE   (Tunisia)

Author keywords

AC impedance spectroscopy; Gas sensor; Ozone; WO3

Indexed keywords

ADSORPTION; CHEMICAL SENSORS; ELECTRIC IMPEDANCE; ELECTRIC PROPERTIES; GRAIN BOUNDARIES; MORPHOLOGY; MOS DEVICES; OZONE; SPECTROSCOPIC ANALYSIS; TEMPERATURE DISTRIBUTION; THIN FILMS;

AC IMPEDANCE SPECTROSCOPY; OZONE SENSORS; WO3; WORKING TEMPERATURES;

TUNGSTEN COMPOUNDS;

EID: 17644410775     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.09.022     Document Type: Article

References (21)

1. 3 thin films as ozone gas sensor Sens. Actuators B 84 2002 1 5
2. C. Lemire, D.B.B. Lollman, A.A. Mohammad, E. Gillet, and K. Aguir Sens. Actuators B 84 2002 43 48
3. 2 concentration in the sputtering gas and working temperature Sens. Actuators B 100 2004 320 324
4. H. Meixner, and U. Lampe Metal oxide sensors Sens. Actuators B 33 1996 198 202
5. 3-based gas sensors Sens. Actuators B 60 1999 71 77
6. 3 thin film Sens. Actuators B 35/36 1996 112 118
7. W. Qu, and W. Wlodarski A thin-film sensing element for ozone, humidity and temperature Sens. Actuators 64 2000 42 48
8. x monitoring Sens. Actuators B 26/27 1995 89 92
9. S. Moulzolf, S. Ding, and R. Lad Stoichiometry and microstructure effects on tungsten oxide chemiresistive films Sens. Actuators B 77 2001 375 382
10. 3 thin film obtained by high vacuum thermal evaporation Sens. Actuators B 31 1996 81 87
11. D. Lee, J. Lim, S. Lee, J. Huh, and D. Lee Fabrication and characterization of micro-gas sensor of nitrogen oxides gas detection Sens. Actuators B 64 2000 31 36
12. x thin films Sens. Actuators B 1 1990 176 182
13. R. Macdonald Impedance Spectroscopy 1987 Wiley New York
14. J.C.C. Abrantes, J.A. Labrincha, and J.R. Frade An alternative representation of impedance spectra of ceramics Mater. Res. Bull. 35 2000 727 740
15. G. Kiss, Z. Pintér, I.V. Perczel, Z. Sassi, and F. Réti Study of oxide semiconductor sensor materials by selected methods Thin Solid Films 391 2001 216 223
16. L.E. Depero, S. Gropelli, I. Natali-sora, L. Sangaletti, G. Sberveglieri, and E. Tondello Structural studies of tungsten-titanium oxide thin films J. Solid State Chem. 121 1996 379
17. P.M. Woodward, A.W. Sleight, and T. Vogt Structure refinement of triclinic tungsten trioxide J. Phys. Chem. Solids 56 1995 1305
18. J.M. Madou, and S.R. Morrison Chemical Sensing with Solid State Devices 1989 Academic Press Chapters 3 and 12
19. H. Windischmann, and P. Mark J. Electrochem. Soc. 126 1979 627
20. 2-based devices Sens. Actuators 18 1989 71
21. S. Ferrer, and G.S. Somorjai J. Appl. Phys. 52 7 1981 4792