Highly sensitive hydrogen sensors based on co-sputtered platinum-activated tungsten oxide films

International Journal of Hydrogen Energy

Volumn 36, Issue 1, 2011, Pages 1107-1114

  Zhang, Chao ^a   Boudiba, Abdelhamid ^a   Navio, Cristina ^a   Bittencourt, Carla ^a   Olivier, Marie Georges ^a   Snyders, Rony ^a,b   Debliquy, Marc ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b MATERIA NOVA RESEARCH CENTER   (Belgium)

Author keywords

Hydrogen sensor; Metal oxide gas sensor; Platinum activated tungsten oxide film; Radio frequency sputtering

Indexed keywords

CRYSTALLINE PHASE; HIGHLY SENSITIVE; HYDROGEN SENSOR; METAL OXIDE GAS SENSOR; RADIO FREQUENCIES; RADIO FREQUENCY SPUTTERING; RELATIVE HUMIDITIES; SENSING PERFORMANCE; THERMAL TREATMENT; THERMALLY TREATED FILMS; TUNGSTEN OXIDE; TUNGSTEN OXIDE FILMS; TWO-STEP HEAT TREATMENT;

ATMOSPHERIC HUMIDITY; CHEMICAL SENSORS; GAS DETECTORS; HEAT TREATMENT; HYDROGEN; METALLIC COMPOUNDS; MICROSTRUCTURE; OXIDES; PLATINUM; RADIO; RADIO WAVES; SCANNING ELECTRON MICROSCOPY; TUNGSTEN; TUNGSTEN COMPOUNDS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

OXIDE FILMS;

EID: 79251621031     PISSN: 03603199     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijhydene.2010.10.011     Document Type: Article

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