Detection of SO2 and H2S in CO2 stream by means of WO3-based micro-hotplate sensors

Sensors and Actuators, B: Chemical

Volumn 102, Issue 2, 2004, Pages 219-225

  Stankova, M ^a   Vilanova, X ^a   Calderer, J ^b   Llobet, E ^a   Ivanov, P ^a   Gracia I ^c   Cane C ^c   Correig, X ^a  

^a UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Beverage grade CO2; Hydrogen sulfide; Micro hotplate; Sulfur oxide; Tungsten oxide

Indexed keywords

CARBON DIOXIDE; DEPOSITION; DOPING (ADDITIVES); ELECTRODES; FABRICATION; HYDROCARBONS; HYDROGEN SULFIDE; MAGNETRON SPUTTERING; STANDARDS; SULFUR DIOXIDE; TUNGSTEN ORE TREATMENT;

BEVERAGE GRADE CO2; MICRO-HOTPLATE SENSORS; SAFETY STANDARDS; TUNGSTEN OXIDE;

MICROSENSORS;

EID: 4344679400     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2004.04.030     Document Type: Article

References (22)

1. ISBT Carbon Dioxide Quality Guidelines and Analytical Procedure Bibliography, International Society of Beverage Technologists, USA, March 2001.
2. R.L. Firor, B.D. Quimby, Analysis of Trace Sulfur Compounds in Beverage Grade Carbon Dioxide, Agilent Technologies Inc., USA, April 2, 2001.
3. 2-based devices. Sens. Actuators. 18:1989;71-113.
4. S.R. Morrison, Chemical sensors, in: S.M. Sze (Ed.), Semiconductor Sensors, Wiley, USA, 1994, pp. 383-413.
5. 2 based sensors, in: Proceedings of Eurosensors XVI, The 16th European Conference on Solid-state Transducers, Prague, Czech Republic, September 15-18, 2002, pp. 952-955.
6. W. Schmid, N. Bârsan, U. Weimar, Sensing of hydrocarbons and CO in low oxygen concentrations with tin oxide sensors: possible conversion paths, in: Proceedings of Eurosensors XVII, The 17th European Conference on Solid-state Transducers, September 21-24, 2003, Guimarães, Portugal, pp. 1105-1107.
7. 3 films in different oxygen atmospheres, in: Proceedings of Eurosensors XVII, The 17th European Conference on Solid-state Transducers, September 21-24, 2003, Guimarães, Portugal, pp. 859-860.
8. 3 nanoparticles for porous film applications by advances reactive gas deposition, J. Eur. Ceram. Soc. 24 (2004) 1415-1419.
9. X. Vilanova, X. Correig, E. Llobet, J. Brezmes, R. Calavia, X. Sánchez, Sistema analizador para la detección de gases reductores y oxidantes en un gas portador y sensor de gases basado en óxidos metálicos de tipo semiconductor, Patent pending, priority number 200300003, Spain, 2003.
10. X. Vilanova, E. Llobet, J. Brezmes, R. Calavia, X. Sánchez, X. Correig, A multisensor system for monitoring the quality of carbon dioxide in the beverage industry, in: Proceedings of the IEEE Transducers 2003, vol. 2, Boston, USA, pp. 1347-1350.
11. 3 by noble metal loadings. Sens. Actuators B. 77:2001;35-40.
12. 3 thin-film sensors array. Sens. Actuators B. 81:2001;115-121.
13. 2S at room temperature. Sens. Actuators B. 77:2001;316-321.
14. 3 thin film sensors fabricated by micromachining. Sens. Actuators B. 81:2002;237-247.
15. 2S-sensitive tungsten oxide films. Sens. Actuators B. 31:1996;167-174.
16. 3 gas-sensing films. Thin Solid Films. 256:1995;247-252.
17. Götz A., Gràcia I., Cané C., Lora-Tamayo E., Horillo M.C., Getino J., García C., Gutiérrez J. A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons. Sens. Actuators B. 44:1997;483-487.
18. Bittencourt C., Landers R., Llobet E., Molas G., Correig X., Silva M.A.P., Sueiras J.E., Calderer J. Effects of oxygen partial pressure and annealing temperature on the formation of sputtered tungsten oxide films. J. Electrochem. Soc. 149(3):2002;H81-H86.
19. Qu W., Green R., Austin M. Development of multi-functional sensors in thick-film and thin-film technology. Meas. Sci. Technol. 11:2000;1111-1118.
20. x monitoring. Sens. Actuators B. 26-27:1995;89-92.
21. 3 thin film. Sens. Actuators B. 35-36:1996;112-118.
22. Gardner J.W. A non-linear diffusion-reaction model of electrical conduction in semiconductor gas sensors. Sens. Actuators B. 1:1990;166-170.