The gas-sensing properties of WO3-x thin films deposited via the atmospheric pressure chemical vapour deposition (APCVD) of WCl6 with ethanol

Measurement Science and Technology

Volumn 19, Issue 2, 2008, Pages

  Ashraf, Sobia ^a   Blackman, Christopher S ^a   Naisbitt, Simon C ^a   Parkin, Ivan P ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

Author keywords

CVD; Tungsten oxide

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; ETHANOL; THERMAL EFFECTS; THIN FILMS;

TUNGSTEN OXIDE; TUNGSTEN OXIDE FILMS;

CHEMICAL SENSORS;

ATMOSPHERIC PRESSURE; CHEMICAL SENSORS; CHEMICAL VAPOR DEPOSITION; ETHANOL; THERMAL EFFECTS; THIN FILMS;

EID: 42549144029     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/19/2/025203     Document Type: Article

References (19)

1. Deb S K 1973 Optical and photoelectric properties and colour centres in thin films of tungsten oxide Phil. Mag. 27 801
2. Monk P M S, Mortimer R J and Rosseinsky D R 1995 Electrochromism: Fundamentals and Applications (New York: VCH)
3. 3 thin films as a gas sensor J. Vac. Sci. Technol. A 17 1873
4. Regragui M, Addou M, Outzourhit A, Bernede J C, El Iddrissi E L B, Benseddik E and Kachouane A 2000 Preparation and characterization of pyrolytic spray deposited electrochromic tungsten trioxide films Thin Solid Films 358 40
5. 3 thin films for electrochromic devices Appl. Surf. Sci. 153 1
6. Kirss R U and Meda L 1998 Chemical vapor deposition of tungsten oxide Appl. Organometallic Chem. 12 155
7. 6 with O-containing solvents and their photochromic and electrochromic properties Chem. Mater. 17 1583
8. Granqvist C G 1995 Handbook of Inorganic Electrochromic Materials (New York: Elsevier)
9. Granqvist C G 2000 Electrochromic tungsten oxide films: review of progress Sol. Energy. Mater. Sol. Cells 60 201
10. Naisbitt S C, Pratt K F E, Williams D E and Parkin I P 2006 A microstructural model of semiconducting gas sensor response: the effects of sintering temperature on the response of chromium titanate (CTO) to carbon monoxide Sensors Actuators B 114 969
11. Shaw G, Parkin I P, Pratt K F E and Williams D E 2005 Control of semiconducting oxide gas-sensor microstructure by application of an electric field during aerosol-assisted chemical vapour deposition J. Mater. Chem. 15 149
12. 3 thin films using polyoxometallate precursors and their gas sensing properties J. Mater. Chem. 17 1063
13. Blackman C, Hyett G and Parkin I P 2007 The effect of oxygen-containing reagents on the crystal morphology and orientation in tungsten oxide thin films deposited via atmospheric pressure chemical vapour deposition (APCVD) on glass substrates Faraday Discuss. 136 329
14. 3 Acta Crystallogr. A 31 360
15. De Giulio M, Manno D, Micocci G, Serra A and Tepore A 1997 Gas-sensing properties of sputtered thin films of tungsten oxide J. Phys. D: Appl. Phys. 30 3211
16. 3 thin films as ozone gas sensor Sensors Actuators B 84 1
17. 2 gas sensors: a status report Fresenius J. Anal. Chem. 365 287
18. Williams D E 1987 Solid State Gas Sensors ed P T Mosley and B C Tofield (Bristol: Institute of Physics Publishing)
19. Windischmann H and Mark P 1979 A model for the operation of a thin-film SnOx conductance-modulation carbon monoxide sensor J. Electrochem. Soc. 126 627