100 NM thick aluminum nitride based piezoelectric nano switches exhibiting 1 MV threshold voltage via body-biasing

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 352-355

  Sinha, Nipun ^a   Guo, Zhijun ^a   Felmetsger, Valery V ^b   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

^b Tegal Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINUM NITRIDE; III-V SEMICONDUCTORS; MICROSYSTEMS; NANOSENSORS; NITRIDES; PIEZOELECTRICITY; THRESHOLD VOLTAGE;

ALN FILMS; ALUMINUM NITRIDE (ALN); BODY BIASING; NANO FILMS; NANO-SWITCHES; NANOSWITCH; ULTRA-THIN;

SOLID-STATE SENSORS;

EID: 84921656974     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.94     Document Type: Conference Paper

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