Maneuvering pull-in voltage of an electrostatic micro-switch by introducing a pre-charged electrode

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 439-442

  Yang, Hyun Ho ^a   Jeong, Oen Lee ^a   Yoon, Jun Bo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROLYSIS; ELECTRON DEVICES; METALLIZING;

FLOATING ELECTRODES; HYSTERIC CURVE; NON-VOLATILE MEMORIES; PULL-IN VOLTAGES; SUBSTRATE BIASING;

ELECTROSTATICS;

EID: 50249140118     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4418967     Document Type: Conference Paper

References (5)

1. W.C. Tang, T.C.H. Nquyen and T.R. Howe, "Laterally driven polysilicon resonant microstructures," Sensors and Actuators 20, pp. 25-32, 1989.
2. R. Yeh, S. Hollar, K.S.J Pister, "Single mask, large force, and large displacement electrostatic linear inchworm motors," IEEE Journal of MEMS, vol. 11, pp. 330-336, April 2002.
3. Gabriel M. Rebeiz, "RF MEMS theory, design and technology," New Jersey: Jone Wiley & Sons, Inc, 2003.
4. H. C. Nathanson, William E. Newell, Robert A. Wickstrom, and John Ransford Davis, JR., "The resonant gate transistor," IEEE Trans. Electron Devices, vol.ED-14, pp. 117-133, March 1967.
5. A.P.De Silva, et al., "Motorola MEMS switch technology for high frequency applications," in IEEE Int. MEMS Conference, 2001, pp. 22-24.