Demonstration of low voltage and functionally complete logic operations using body-biased complementary and ultra-thin A1N piezoelectric mechanical switches

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 751-754

  Sinha, Nipun ^a   Jones, Timothy ^a   Guo, Zhijun ^a   Piazza, Gianluca ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; ALN FILMS; BODY BIAS; LOGIC ELEMENTS; LOGIC OPERATIONS; LOW VOLTAGES; MECHANICAL SWITCH; ON-BODY; ULTRA-THIN;

DEMONSTRATIONS; MECHANICAL ENGINEERING; MECHANICS; NITRIDES; PIEZOELECTRICITY; REACTIVE ION ETCHING; TIME SWITCHES;

ALUMINUM NITRIDE;

EID: 77952779203     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442297     Document Type: Conference Paper

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