Piezoelectric nanoswitch

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 591-594

  Judy, D C ^a   Pulskamp, J S ^a   Polcawich, R G ^a   Currano, L ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR-BRIDGE; LEAD ZIRCONATE TITANATE ACTUATORS; LOW LEAKAGE; MECHANICAL LOGIC; MECHANICAL SWITCH; NANO SCALE; NANOSWITCH; SWITCHING TIME;

ELECTRON BEAMS; FABRICATION; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTING LEAD COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

SWITCHES;

EID: 65949116822     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805451     Document Type: Conference Paper

References (8)

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