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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 32, Issue 1, 2014, Pages

Fabrication of monodisperse particles by nanoimprinting using anodic porous alumina molds

(4) Yanagishita, Takashi a Kawamoto, Midori a Nishio, Kazuyuki a Masuda, Hideki a

a TOKYO METROPOLITAN UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; NANOIMPRINT LITHOGRAPHY;

ANODIC POROUS ALUMINA; GEOMETRICAL STRUCTURE; HIGH THROUGHPUT; MONO-DISPERSE PARTICLES; NANO-IMPRINTING; SIZE AND SHAPE;

MOLDS;

EID: 84921469094 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.4837396 Document Type: Article

Times cited : (1)

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