SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics

Volumn 49, Issue 6 PART 1, 2010, Pages 0652021-0652023

Preparation of antireflection SiO2 structures based on nanoimprinting using anodic porous alumina molds

(4) Yanagishita, Takashi a,b Endo, Takahide a Nishio, Kazuyuki a,b Masuda, Hideki a,b

a TOKYO METROPOLITAN UNIVERSITY (Japan)

b KANAGAWA ACADEMY OF SCIENCE AND TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC POROUS ALUMINA; ANTI-REFLECTION; FINE PATTERN; GEOMETRICAL STRUCTURE; HIGH ASPECT RATIO; INCIDENT LIGHT; NANO-IMPRINTING; ORDERED ARRAY; PILLAR ARRAYS; SIZE AND SHAPE;

ASPECT RATIO; MOLDS; PLANTS (BOTANY);

SILICON COMPOUNDS;

EID: 77955340400 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.49.065202 Document Type: Article

Times cited : (9)

References (14)

1
- 84950630091
- S. J. Wilson and M. C. Hutley: Opt. Acta 29 (1982) 993.
- (1982) Opt. Acta , vol.29 , pp. 993
- Wilson, S.J.¹ Hutley, M.C.²

2
- 84975604806
- M. E. Motamedi, W. H. Southwell, and W. J. Gunning: Appl. Opt. 31 (1992) 4371.
- (1992) Appl. Opt. , vol.31 , pp. 4371
- Motamedi, M.E.¹ Southwell, W.H.² Gunning, W.J.³

3
- 0031164097
- P. Lalanne and G. M. Morris: Nanotechnology 8 (1997) 53.
- (1997) Nanotechnology , vol.8 , pp. 53
- Lalanne, P.¹ Morris, G.M.²

4
- 0030570065
- S. Y. Chou, P. R. Krauss, and P. J. Renstrom: Science 272 (1996) 85.
- (1996) Science , vol.272 , pp. 85
- Chou, S.Y.¹ Krauss, P.R.² Renstrom, P.J.³

5
- 0001532359
- B. D. Terris, H. J. Mamin, M. E. Best, J. A. Logan, D. Rugar, and S. A. Rishton: Appl. Phys. Lett. 69 (1996) 4262.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 4262
- Terris, B.D.¹ Mamin, H.J.² Best, M.E.³ Logan, J.A.⁴ Rugar, D.⁵ Rishton, S.A.⁶

6
- 5344268855
- J. Haisma, M. Verheijien, K. Heuvel, and J. Berg: J. Vac. Sci. Technol. B 14 (1996) 4124.
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 4124
- Haisma, J.¹ Verheijien, M.² Heuvel, K.³ Berg, J.⁴

7
- 57049175986
- T. Yanagishita, K. Nishio, and H. Masuda: Appl. Phys. Express 1 (2008) 067004.
- (2008) Appl. Phys. Express , vol.1 , pp. 067004
- Yanagishita, T.¹ Nishio, K.² Masuda, H.³

8
- 57249111776
- T. Yanagishita, T. Kondo, K. Nishio, and H. Masuda: J. Vac. Sci. Technol. B 26 (2008) 1856.
- (2008) J. Vac. Sci. Technol. B , vol.26 , pp. 1856
- Yanagishita, T.¹ Kondo, T.² Nishio, K.³ Masuda, H.⁴

9
- 4444289857
- H. Masuda and K. Fukuda: Science 268 (1995) 1466.
- (1995) Science , vol.268 , pp. 1466
- Masuda, H.¹ Fukuda, K.²

10
- 34547569072
- T. Yanagishita, K. Nishio, and H. Masuda: J. Vac. Sci. Technol. B 25 (2007) L35.
- (2007) J. Vac. Sci. Technol. B , vol.25
- Yanagishita, T.¹ Nishio, K.² Masuda, H.³

11
- 0036613997
- Y. Igaku, S. Matsui, H. Ishigaki, J. Fujita, M. Ishida, Y. Ochiai, M. Komuro, and H. Hiroshima: Jpn. J. Appl. Phys. 41 (2002) 4198.
- (2002) Jpn. J. Appl. Phys. , vol.41 , pp. 4198
- Igaku, Y.¹ Matsui, S.² Ishigaki, H.³ Fujita, J.⁴ Ishida, M.⁵ Ochiai, Y.⁶ Komuro, M.⁷ Hiroshima, H.⁸

12
- 33744799433
- M. Okinaka, K. Tsukagoshi, and Y. Aoyagi: J. Vac. Sci. Technol. B 24 (2006) 1402.
- (2006) J. Vac. Sci. Technol. B , vol.24 , pp. 1402
- Okinaka, M.¹ Tsukagoshi, K.² Aoyagi, Y.³

13
- 0000684647
- H. Masuda, H. Yamada, M. Satoh, H. Asoh, M. Nakao, and T. Tamamura: Appl. Phys. Lett. 71 (1997) 2770.
- (1997) Appl. Phys. Lett. , vol.71 , pp. 2770
- Masuda, H.¹ Yamada, H.² Satoh, M.³ Asoh, H.⁴ Nakao, M.⁵ Tamamura, T.⁶

14
- 34248553593
- T. Yanagishita, K. Yasui, T. Kondo, Y. Kawamoto, K. Nishio, and H. Masuda: Chem. Lett. 36 (2007) 530.
- (2007) Chem. Lett. , vol.36 , pp. 530
- Yanagishita, T.¹ Yasui, K.² Kondo, T.³ Kawamoto, Y.⁴ Nishio, K.⁵ Masuda, H.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.