In-situ studies on 2D materials

ECS Transactions

Volumn 64, Issue 9, 2014, Pages 109-116

  Wallace, R M ^a  

^a The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; CMOS INTEGRATED CIRCUITS; DEPOSITION; SURFACE CLEANING; SURFACE REACTIONS; TRANSITION METALS;

BEYOND CMOS; DEVICE APPLICATION; FILM DEPOSITION; IN-SITU CHARACTERIZATION; IN-SITU STUDY; PHYSICAL AND ELECTRICAL CHARACTERIZATIONS; TRANSITION METAL DICHALCOGENIDES;

CHARACTERIZATION;

EID: 84921454398     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/06409.0109ecst     Document Type: Conference Paper

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