Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteries

Nanotechnology

Volumn 25, Issue 50, 2014, Pages

  Wang, Biqiong ^a   Liu, Jian ^a   Sun, Qian ^a   Li, Ruying ^a   Sham, Tsun Kong ^a   Sun, Xueliang ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

Atomic layer deposition; Lithium phosphate; Solid state electrolyte

Indexed keywords

ACTIVATION ENERGY; ATOMIC LAYER DEPOSITION; ATOMS; DEPOSITION; ELECTROCHEMICAL IMPEDANCE SPECTROSCOPY; ELECTROLYTES; FILM GROWTH; IONIC CONDUCTIVITY; LITHIUM; MINIATURE BATTERIES; PHOSPHATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ALL-SOLID-STATE; CYCLE NUMBER; DEPOSITION TEMPERATURES; LINEAR DEPENDENCE; LITHIUM PHOSPHATE; SOLID-STATE ELECTROLYTE; TERT-BUTOXIDE; TRIMETHYLPHOSPHATE;

SOLID ELECTROLYTES;

EID: 84913593238     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/25/50/504007     Document Type: Article

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