Atomic layer deposition of LiCoO2 thin-film electrodes for all-solid-state Li-ion micro-batteries

Journal of the Electrochemical Society

Volumn 160, Issue 5, 2013, Pages

  Donders, M E ^a,b   Arnoldbik, W M ^b   Knoops, H C M ^b   Kessels, W M M ^b   Notten, P H L ^b  

^a MATERIALS INNOVATION INSTITUTE M2I   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC BACKSCATTERING; ELECTROCHEMICAL PERFORMANCE; HIGH TEMPERATURE PHASE; LI-ION MICRO-BATTERIES; LITHIUM-ION BATTERY; PORTABLE ELECTRONICS; REMOTE PLASMA ATOMIC LAYER DEPOSITIONS; STRUCTURED SUBSTRATE;

ATOMIC LAYER DEPOSITION; BACKSCATTERING; CATHODES; CHEMICAL ELEMENTS; DEPOSITS; ELECTROCHEMICAL ELECTRODES; LITHIUM; RAMAN SPECTROSCOPY; THIN FILMS;

LITHIUM BATTERIES;

EID: 84875697762     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/2.011305jes     Document Type: Article

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