Servo-integrated patterned media by hybrid directed self-assembly

ACS Nano

Volumn 8, Issue 11, 2014, Pages 11854-11859

  Xiao, Shuaigang ^a   Yang, Xiaomin ^a   Steiner, Philip ^a   Hsu, Yautzong ^a   Lee, Kim ^a   Wago, Koichi ^a   Kuo, David ^a  

^a SEAGATE TECHNOLOGY   (United States)

Author keywords

Bit patterned media; Block copolymer; Directed self assembly; Overlay; Servo integration; Spinstand

Indexed keywords

BLOCK COPOLYMERS; DIGITAL STORAGE; MAGNETIC STORAGE; NANOIMPRINT LITHOGRAPHY; PHOTOLITHOGRAPHY; SELF ASSEMBLY; TESTING; TOPOGRAPHY;

BIT-PATTERNED MEDIA; DIRECTED SELF-ASSEMBLY; OVERLAY; PATTERNED MEDIAS; RESOLUTION CAPABILITY; SELF ASSEMBLY PROCESS; SPIN STAND; ULTRAHIGH DENSITY;

BIT ERROR RATE;

EID: 84912562276     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn505630t     Document Type: Article

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