Low cost method for hot embossing of microstructures on PMMA by SU-8 masters

Microsystem Technologies

Volumn 20, Issue 10-11, 2014, Pages 1925-1931

  Shamsi, Alireza ^a   Amiri, Ali ^a   Heydari, Payam ^a   Hajghasem, Hasan ^b   Mohtashamifar, Mansour ^b   Esfandiari, Mehrnaz ^a  

^a ISLAMIC AZAD UNIVERSITY   (Iran)

^b K N TOOSI UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BAKERIES; COSTS; GLASS; MICROCHANNELS; MICROFLUIDICS; MICROSTRUCTURE; POLYMERS; SUBSTRATES;

HOT EMBOSSING LITHOGRAPHY; LOW COST METHODS; MICRO-FABRICATION TECHNOLOGY; MICRO-FLUIDIC DEVICES; POLYMETHYLMETACRYLATE; STANDARD LITHOGRAPHIES; SUBSTRATE PRE-TREATMENTS; THERMAL-ANNEALING;

LITHOGRAPHY;

EID: 84907257030     PISSN: 09467076     EISSN: 14321858     Source Type: Journal    
DOI: 10.1007/s00542-013-2000-z     Document Type: Article

References (20)

1. Becker H, Dietz W (1998) Microfluidic devices for μ-TAS applications fabricated by polymer hot embossing. Proc SPIE 3515:177-182. doi: 10.1117/12.322081
2. Becker H, Heim U (1999) Silicon as tool material for polymer hot embossing. Proc IEEE Int Conf MEMS 99:228-231
3. Becker H, Heim U (2000) Hot embossing as a method for the fabrication of polymer high aspect ratio structures. J Sens Actuators A 83:130-135
4. Chen SC, Lin MC, Chien RD, Liaw WL (2005) Hot embossing of micro-featured devices. Proc Int Conf Mechatron, Taiwan
5. del Campo A, Greiner C (2007) SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography. J Micromech Microeng 17:R81-R95
6. Esch MB, Kapur S, Irizarry G, Genova V (2003) Influence of master fabrication techniques on the characteristics of embossed microfluidic channels. Lab Chip 3:121-127
7. Grist S, Patel JN, Haq M, Gray BL, Kaminska B (2010) Effect of surface treatments/coatings and soft bake profile on surface uniformity and adhesion of SU-8 on a glass substrate. J Microfluidics Biomems Med Microsyst 7593:75930F-1-75930F-9
8. Harsono, Lu HJ, Liu YC, Lam YC, Shan XC (2006) Experimental studies on polymer deformation and flow in micro hot embossing, electronics packaging technology conference, EPTC '06. Singapore, 8 2006
9. Lee G-B et al (2001) Microfabricated plastic chips by hot embossing methods and their applications for DNA separation and detection. J Sens Actuators B 75:142-148
10. Li JM, Liu C, Dai XD, Chen HH, Liang Y, Sun HL, Tian H, Ding XP (2008) PMMA microfluidic devices with threedimensional features for blood cell filtration. J Micromech Microeng. doi: 10.1088/0960-1317/18/9/095021
11. Mao Xu et al (2013) Two new methode to improve the lithography precision for SU-8 photoresist on glass substrate. J Microelectromech Syst 22:124-130. doi: 10.1109/JMEMS.2012.2219295
12. Mathur A, Roy SS, Tweedie M, Mukhopadhyay S, Mitra SK, McLaughlin JA (2009) Characterisation of PMMA microfluidic channels and devices fabricated by hot embossing and sealed by direct bonding. J Curr Appl Phys 9:1199-1202
13. Metwally K, Robert L, Salut R Malek CK (2011) SU-8-based rapid tooling for thermal roll embossing. In: Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) 2011. Aix-en-Provence, France, pp 279-283, 11-13 May 2011
14. Microchem (2013). http://www.michrochem.com Accessed Jan 2013
15. Narasimhan J, Papautsky I (2004) Polymer embossing tools for rapid prototyping of plastic microfluidic devices. J Micromech Microeng 14:96-103. doi: 10.1088/0960
16. Terry K, Brown L, Xie R, Oleschuk RD (2005) Epoxy resins as stamps for hot embossing of microstructures and microfluidic channels. Sens Actuators B 107:632-639
17. Tsao CW, DeVoe DL (2009) Bonding of thermoplastic polymer microfluidics. J Microfluid Nanofluid 6:1-16. doi: 10.1007/s10404-008-0361
18. Wang W, Soper SA (2007) Bio-MEMS technologies and applications. CRC Press, New York
19. Yaxi F, Tingjie L, Lau WM, Yang J (2012) A rapid hot-embossing prototyping approach using SU-8 molds coated with metal and antistick coatings. J Microelectromech Syst 21(4):875-881
20. Zhao Y, Cui T (2003) Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique. J Micromech Microeng 13:430-435