Effect of surface treatments/coatings and soft bake profile on surface uniformity and adhesion of SU-8 on a glass substrate

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 7593, Issue , 2010, Pages

  Grist, Samantha ^a   Patel, Jasbir N ^a   Haq, Moeed ^a   Gray, Bonnie L ^a   Kaminska, Bozena ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS SUBSTRATES; INSTRON; METAL LAYER; PROCESS PARAMETERS; SEED LAYER; SOFT BAKE; SOFT BAKE TEMPERATURE; STRESS TESTING; SURFACE UNIFORMITY;

BOND STRENGTH (MATERIALS); CHROMATE COATINGS; CHROMIUM; GLASS; MICROFLUIDICS; MICROSYSTEMS; SUBSTRATES; SURFACE TREATMENT;

ADHESION;

EID: 79958101360     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.842957     Document Type: Conference Paper

References (14)

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