A rapid hot-embossing prototyping approach using SU-8 molds coated with metal and antistick coatings

Journal of Microelectromechanical Systems

Volumn 21, Issue 4, 2012, Pages 875-881

  Fan, Yaxi ^a   Li, Tingjie ^a   Lau, Woon Ming ^a,b   Yang, Jun ^a  

^a UNIVERSITY OF WESTERN ONTARIO   (Canada)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

Hot embossing; rapid prototyping; SU 8 molds

Indexed keywords

CONVENTIONAL PHOTOLITHOGRAPHY; COPPER SURFACE; COPPER THIN FILM; FABRICATION PROCEDURE; HOT-EMBOSSING; HOT-EMBOSSING LITHOGRAPHY; LASER MACHINING; MASTER MOLDS; NANO SCALE; NEGATIVE PHOTORESISTS; PROCESSING TIME; PROTOTYPING PROCESS; SMALL-VOLUME PRODUCTION; STRUCTURAL LAYERS; SURFACE SMOOTHNESS; THREE-LAYER;

COPPER; DEGRADATION; FABRICATION; LITHOGRAPHY; RAPID PROTOTYPING; SILICON WAFERS; STRUCTURAL DESIGN; X RAY LITHOGRAPHY;

MOLDS;

EID: 84864584383     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2012.2194776     Document Type: Article

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