Crack-release transfer method of wafer-scale grown graphene onto large-area substrates

ACS Applied Materials and Interfaces

Volumn 6, Issue 15, 2014, Pages 12588-12593

  Lee, Jooho ^a   Kim, Yongsung ^a   Shin, Hyeon Jin ^a   Lee, Changseung ^a   Lee, Dongwook ^a   Lee, Sunghee ^a   Moon, Chang Yul ^a   Lee, Su Chan ^b   Kim, Sun Jun ^b   Ji, Jae Hoon ^b   Yoon, Hyong Seo ^b   Jun, Seong Chan ^a,b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Yonsei University   (South Korea)

Author keywords

bubble; crack release; dry attachment; electrolysis; graphene

Indexed keywords

CATALYSTS; CRACKS; ELECTROLYSIS; FAILURE (MECHANICAL); SILICON; SILICON OXIDES; SILICON WAFERS; SUBSTRATES;

BUBBLE; CONVENTIONAL METHODS; CRACK-RELEASE; ELECTROLYSIS REACTION; LARGE-AREA SUBSTRATES; MECHANICAL DAMAGES; OPTICAL AND ELECTRICAL PROPERTIES; WAFER TO WAFER BONDING;

GRAPHENE;

EID: 84906256551     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/am502565z     Document Type: Article

References (36)

1. Novoselov, K. S.; Geim, A. K.; Morozov, S.; Jiang, D.; Zhang, Y.; Dubonos, S.; Grigorieva, I.; Firsov, A. Electric Field Effect in Atomically Thin Carbon Films Science 2004, 306 (5696) 666-669
2. Zhang, Y.; Tan, Y.-W.; Stormer, H. L.; Kim, P. Experimental Observation of the Quantum Hall Effect and Berrys Phase in Graphene Nature 2005, 438 (7065) 201-204
3. Geim, A. K. Graphene: Status and Prospects Science 2009, 324 (5934) 1530-1534
4. Geim, A. K.; Novoselov, K. S. The Rise of Graphene Nat. Mater. 2007, 6 (3) 183-191
5. Blake, P.; Brimicombe, P. D.; Nair, R. R.; Booth, T. J.; Jiang, D.; Schedin, F.; Ponomarenko, L. A.; Morozov, S. V.; Gleeson, H. F.; Hill, E. W.; Geim, A. K.; Novoselov, K. S. Graphene-Based Liquid Crystal Device Nano Lett. 2008, 8 (6) 1704-1708
6. Wang, X.; Zhi, L.; Müllen, K. Transparent, Conductive Graphene Electrodes for Dye-Sensitized Solar Cells Nano Lett. 2008, 8 (1) 323-327
7. Kim, K. S.; Zhao, Y.; Jang, H.; Lee, S. Y.; Kim, J. M.; Kim, K. S.; Ahn, J.-H.; Kim, P.; Choi, J.-Y.; Hong, B. H. Large-Scale Pattern Growth of Graphene Films for Stretchable Transparent Electrodes Nature 2009, 457 (7230) 706-710
8. Kim, W. K.; Jung, Y. M.; Cho, J. H.; Kang, J. Y.; Oh, J. Y.; Kang, H.; Lee, H.-J.; Kim, J. H.; Lee, S.; Shin, H. Radio-Frequency Characteristics of Graphene Oxide Appl. Phys. Lett. 2010, 97 (19) 193103
9. Sharma, M.; Ghosh, S. Electron Transport and Goos-Hänchen Shift in Graphene with Electric and Magnetic Barriers: Optical Analogy and Band Structure J. Phys.: Condens. Matter 2011, 23 (5) 055501
10. Lin, Y.-M.; Dimitrakopoulos, C.; Jenkins, K. A.; Farmer, D. B.; Chiu, H.-Y.; Grill, A.; Avouris, P. 100-GHz Transistors from Wafer-Scale Epitaxial Graphene Science 2010, 327 (5966) 662-662
11. Huang, Y.; Dong, X.; Shi, Y.; Li, C. M.; Li, L.-J.; Chen, P. Nanoelectronic Biosensors Based on CVD grown Graphene Nanoscale 2010, 2 (8) 1485-1488
12. Yang, H.; Heo, J.; Park, S.; Song, H. J.; Seo, D. H.; Byun, K.-E.; Kim, P.; Yoo, I.; Chung, H.-J.; Kim, K. Graphene Barristor, a Triode Device with a Gate-Controlled Schottky Barrier Science 2012, 336 (6085) 1140-1143
13. Reina, A.; Jia, X.; Ho, J.; Nezich, D.; Son, H.; Bulovic, V.; Dresselhaus, M. S.; Kong, J. Large Area, Few-layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition Nano Lett. 2008, 9 (1) 30-35
14. Li, X.; Cai, W.; An, J.; Kim, S.; Nah, J.; Yang, D.; Piner, R.; Velamakanni, A.; Jung, I.; Tutuc, E.; Banerjee, S. K.; Colombo, L.; Ruoff, R. S. Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils Science 2009, 324 (5932) 1312-1314
15. Bae, S.; Kim, H.; Lee, Y.; Xu, X.; Park, J.-S.; Zheng, Y.; Balakrishnan, J.; Lei, T.; Kim, H. R.; Song, Y. I.; Kim, Y.-J.; Kim, K. S.; Ozyilmaz, B.; Ahn, J.-H.; Hong, B. H.; Iijima, S. Roll-to-Roll Production of 30-in. Graphene Films for Transparent Electrodes Nat. Nanotechnol. 2010, 5 (8) 574-578
16. Verma, V. P.; Das, S.; Lahiri, I.; Choi, W. Large-area Graphene on Polymer Film for Flexible and Transparent Anode in Field Emission Device Appl. Phys. Lett. 2010, 96 (20) 203108
17. Kang, J.; Hwang, S.; Kim, J. H.; Kim, M. H.; Ryu, J.; Seo, S. J.; Hong, B. H.; Kim, M. K.; Choi, J.-B. Efficient Transfer of Large-Area Graphene Films onto Rigid Substrates by Hot Pressing ACS Nano 2012, 6 (6) 5360-5365
18. Suk, J. W.; Kitt, A.; Magnuson, C. W.; Hao, Y.; Ahmed, S.; An, J.; Swan, A. K.; Goldberg, B. B.; Ruoff, R. S. Transfer of CVD-Grown Monolayer Graphene onto Arbitrary Substrates ACS Nano 2011, 5 (9) 6916-6924
19. Levendorf, M. P.; Ruiz-Vargas, C. S.; Garg, S.; Park, J. Transfer-Free Batch Fabrication of Single Layer Graphene Transistors Nano Lett. 2009, 9 (12) 4479-4483
20. 2/Si Substrate: Thermal Conductivity of the Wafers Appl. Phys. Lett. 2010, 96 (8) 083101
21. Lee, Y.; Bae, S.; Jang, H.; Jang, S.; Zhu, S.-E.; Sim, S. H.; Song, Y. I.; Hong, B. H.; Ahn, J.-H. Wafer-Scale Synthesis and Transfer of Graphene Films Nano Lett. 2010, 10 (2) 490-493
22. Ismach, A.; Druzgalski, C.; Penwell, S.; Schwartzberg, A.; Zheng, M.; Javey, A.; Bokor, J.; Zhang, Y. Direct Chemical Vapor Deposition of Graphene on Dielectric Surfaces Nano Lett. 2010, 10 (5) 1542-1548
23. Su, C.-Y.; Lu, A.-Y.; Wu, C.-Y.; Li, Y.-T.; Liu, K.-K.; Zhang, W.; Lin, S.-Y.; Juang, Z.-Y.; Zhong, Y.-L.; Chen, F.-R.; Li, L.-J. Direct Formation of Wafer Scale Graphene Thin Layers on Insulating Substrates by Chemical Vapor Deposition Nano Lett. 2011, 11, 3612-3616
24. 2 Insulatior Substrate from Sputtered Carbon and Nickel films Carbon 2013, 65, 349-358
25. 2 substrate ACS Nano 2013, 7 (8) 6575-6582
26. Wang, Y.; Zheng, Y.; Xu, X.; Dubuisson, E.; Bao, Q.; Lu, J.; Loh, K. P. Electrochemical Delamination of CVD-Grown Graphene Film: Toward the Recyclable Use of Copper Catalyst ACS Nano 2011, 5 (12) 9927-9933
27. Gao, L.; Ren, W.; Xu, H.; Jin, L.; Wang, Z.; Ma, T.; Ma, L.-P.; Zhang, Z.; Fu, Q.; Peng, L.-M. Repeated Growth and Bubbling Transfer of Graphene with Millimetre-Size Single-Crystal Grains using Platinum Nat. Commun. 2012, 3, 699
28. 2 Bubbling Transfer of Large Area Graphene Grown by Chemical Vapor Deposition on Cu Appl. Phys. Lett. 2013, 102 (2) 022101
29. Gao, L.; Ni, G.-X.; Liu, Y.; Liu, B.; Neto, A. C.; Loh, K. P. Face-to-Face Transfer of Wafer-Scale Graphene Films Nature 2014, 505, 190-194
30. Woo, Y. S.; Seo, D. H.; Yeon, D.-H.; Heo, J.; Chung, H.-J.; Benayad, A.; Chung, J.-G.; Han, H.; Lee, H.-S.; Seo, S.; Choi, J.-Y. Low Temperature Growth of Complete Monolayer Graphene Films on Ni-Doped Copper and Gold Catalysts by a Self-Limiting Surface Reaction Carbon 2013, 64, 315-323
31. 2O: Electrodeposition and Characterization Chem. Mater. 1999, 11 (12) 3512-3517
32. 2 Nano Lett. 2007, 7 (9) 2707-2710
33. Blake, P.; Hill, E. W.; Castro Neto, A. H.; Novoselov, K. S.; Jiang, D.; Yang, R.; Booth, T. J.; Geim, A. K. Making Graphene Visible Appl. Phys. Lett. 2007, 91 (6) 063124-063124-3
34. Moon, J. S.; Antcliffe, M.; Seo, H. C.; Curtis, D.; Lin, S.; Schmitz, A.; Milosavljevic, I.; Kiselev, A. A.; Ross, R. S.; Gaskill, D. K.; Campbell, P. M.; Fitch, R. C.; Lee, K.-M.; Asbeck, P. Ultra-Low Resistance ωic Contacts in Graphene Field Effect Transistors Appl. Phys. Lett. 2012, 100 (20) 203512
35. Schroder, D. K. Semiconductor material and device characterization; John Wiley & Sons, Inc.: Hoboken, NJ, 2006; Chapter 3.
36. Lee, J.; Kim, Y.; Shin, H.-J.; Lee, C.; Lee, D.; Moon, C.-Y.; Lim, J.; Jun, S. C. Clean Transfer of Graphene and its Effect on Contact Resistance Appl. Phys. Lett. 2013, 103 (10) 103104