Nanofabrication of x-ray zone plates using ultrananocrystalline diamond molds and electroforming

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Volumn 28, Issue 6, 2010, Pages

  Wojcik, Michael J ^a   Joshi, Vishwanath ^b   Sumant, Anirudha V ^b   Divan, Ralu ^b   Ocola, Leonidas E ^b   Lu, Ming ^c   Mancini, Derrick C ^d  

^a Illinois Institute of Technology   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c BROOKHAVEN NATIONAL LABORATORY   (United States)

^d ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DIAMONDS; ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMETALLURGY; FABRICATION; MOLDS; OPTICAL INSTRUMENTS; X RAY DIFFRACTION; X RAYS;

CONCENTRIC RINGS; FOCUSING OPTICS; GOLD ELECTROFORMING; HARD X RAY; HIGH ASPECT RATIO STRUCTURES; MECHANICALLY STABLE; NANOFABRICATION; PHASE-SHIFTING; PHOTON ENERGY; RADIATION RESISTANT; ULTRA-NANOCRYSTALLINE DIAMOND; ZONE PLATES;

PLATES (STRUCTURAL COMPONENTS);

EID: 84905941102     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3501357     Document Type: Article

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