Design and characterization of a thermally actuated latching MEMS switch for telecommunication applications

Journal of Micromechanics and Microengineering

Volumn 24, Issue 7, 2014, Pages

  Dellaert, D ^a   Doutreloigne, J ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

contact resistance; latching switch; microelectromechanical systems (MEMS); thermal actuator

Indexed keywords

CONTACT RESISTANCE; ELECTRIC RELAYS; ELECTROMECHANICAL DEVICES; MEMS; SURFACE MICROMACHINING;

ALTERNATIVE SOLUTIONS; ATTRACTIVE SOLUTIONS; AUTOMATED DISTRIBUTION; ELECTROMAGNETIC RELAYS; LATCHING SWITCH; MICRO ELECTROMECHANICAL SYSTEM (MEMS); TELECOMMUNICATION APPLICATIONS; THERMAL ACTUATOR;

ACTUATORS;

EID: 84905190950     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/24/7/075022     Document Type: Article

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