Novel electrothermally actuated magnetostatic bistable microrelay for telecommunication applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1261-1264

  Staab, M ^a   Schlaak, H F ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BISTABLE MECHANISMS; BISTABLE MICRORELAY; CONTACT FORCES; ELECTRICAL PATH; ELECTRO-THERMAL ACTUATORS; ENERGY EFFICIENT; FAST SWITCHING; MICRO-RELAY; PRODUCTION PROCESS; SURFACE MICROMACHINING PROCESS; TELECOMMUNICATION APPLICATIONS; UV LITHOGRAPHY;

ELECTRIC RELAYS; ELECTROSTATIC ACTUATORS; MAGNETOSTATICS; MECHANICAL ENGINEERING; MECHANICS; MICROMACHINING; REACTIVE ION ETCHING;

MEMS;

EID: 79953767808     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734662     Document Type: Conference Paper

References (14)

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