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Volumn 116, Issue 1, 2014, Pages

Methods for determining piezoelectric properties of thin epitaxial films: Theoretical foundations

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC CONSTANTS; LATTICE MISMATCH; THERMAL EXPANSION; THIN FILMS;

EID: 84904133526     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.4885058     Document Type: Article
Times cited : (16)

References (36)
  • 3
    • 0033682798 scopus 로고    scopus 로고
    • 10.1088/0960-1317/10/2/307
    • P. Muralt, J. Micromech. Microeng. 10, 136 (2000). 10.1088/0960-1317/10/ 2/307
    • (2000) J. Micromech. Microeng. , vol.10 , pp. 136
    • Muralt, P.1
  • 4
    • 33847206105 scopus 로고    scopus 로고
    • 10.1126/science.1129564
    • J. F. Scott, Science 315 (5814), 954-959 (2007). 10.1126/science.1129564
    • (2007) Science , vol.315 , Issue.5814 , pp. 954-959
    • Scott, J.F.1
  • 5
    • 0033895122 scopus 로고    scopus 로고
    • Electroceramic materials
    • DOI 10.1016/S1359-6454(99)00293-1
    • N. Setter and R. Waser, Acta Mater. 48 (1), 151-178 (2000). 10.1016/S1359-6454(99)00293-1 (Pubitemid 30558401)
    • (2000) Acta Materialia , vol.48 , Issue.1 , pp. 151-178
    • Setter, N.1    Waser, R.2
  • 7
    • 84904101834 scopus 로고    scopus 로고
    • NPL Measurement Good Practice Guide No. 23 (NPL), ISSN 1368-6550.
    • M. Stewart, M. G. Cain, and M. Gee, NPL Measurement Good Practice Guide No. 23 (NPL, 1999), ISSN 1368-6550.
    • (1999)
    • Stewart, M.1    Cain, M.G.2    Gee, M.3
  • 11
    • 29744462585 scopus 로고    scopus 로고
    • A double-beam common path laser interferometer for the measurement of electric field-induced strains of piezoelectric thin films
    • DOI 10.1063/1.2149002, 123906
    • Z. Huang and R. W. Whatmore, Rev. Sci. Instrum. 76 (12), 123906 (2005). 10.1063/1.2149002 (Pubitemid 43032251)
    • (2005) Review of Scientific Instruments , vol.76 , Issue.12 , pp. 1-4
    • Huang, Z.1    Whatmore, R.W.2
  • 14
    • 65649130427 scopus 로고    scopus 로고
    • 10.1002/pssa.200824434
    • J. M. Gregg, Phys. Status Solidi A 206 (4), 577-587 (2009). 10.1002/pssa.200824434
    • (2009) Phys. Status Solidi A , vol.206 , Issue.4 , pp. 577-587
    • Gregg, J.M.1
  • 15
    • 33746591766 scopus 로고    scopus 로고
    • Nanoscale ferroelectrics: Processing, characterization and future trends
    • DOI 10.1088/0034-4885/69/8/R04, PII S0034488506839928, R04
    • A. Gruverman and A. Kholkin, Rep. Prog. Phys. 69 (8), 2443-2474 (2006). 10.1088/0034-4885/69/8/R04 (Pubitemid 44144177)
    • (2006) Reports on Progress in Physics , vol.69 , Issue.8 , pp. 2443-2474
    • Gruverman, A.1    Kholkin, A.2
  • 17
    • 19944397715 scopus 로고
    • 10.1063/1.357693
    • K. Lefki and G. J. M. Dormans, J. Appl. Phys. 76 (3), 1764-1767 (1994). 10.1063/1.357693
    • (1994) J. Appl. Phys. , vol.76 , Issue.3 , pp. 1764-1767
    • Lefki, K.1    Dormans, G.J.M.2
  • 18
    • 84904089063 scopus 로고    scopus 로고
    • Proceedings of the 9th Annual NSTI Nanotechnology Conference and Trade Show (NanoTech), Boston, MA, May.
    • M. G. Cain and M. Stewart, Proceedings of the 9th Annual NSTI Nanotechnology Conference and Trade Show (NanoTech), Boston, MA, May 2006.
    • (2006)
    • Cain, M.G.1    Stewart, M.2
  • 22
    • 37849186971 scopus 로고    scopus 로고
    • Piezoelectric film response studied with finite element method
    • DOI 10.1111/j.1551-2916.2006.01295.x
    • H. Sato and J. Akedo, J. Am. Ceram. Soc. 89 (12), 3715-3720 (2006). 10.1111/j.1551-2916.2006.01295.x (Pubitemid 44826048)
    • (2006) Journal of the American Ceramic Society , vol.89 , Issue.12 , pp. 3715-3720
    • Sato, H.1    Akedo, J.2
  • 25
    • 43049093759 scopus 로고    scopus 로고
    • 33 coefficient of films via spatial distribution of piezoelectric displacement
    • DOI 10.1088/0022-3727/41/3/035306, PII S0022372708620124
    • Z. Wang and J. Miao, J. Phys. D: Appl. Phys. 41, 035306 (2008). 10.1088/0022-3727/41/3/035306 (Pubitemid 351622893)
    • (2008) Journal of Physics D: Applied Physics , vol.41 , Issue.3 , pp. 035306
    • Wang, Z.1    Miao, J.2
  • 28
    • 84904091906 scopus 로고    scopus 로고
    • See for "Abaqus Unified FEA - Complete Solutions for Realistic Simulation."
    • See http://www.3ds.com/products-services/simulia/portfolio/abaqus/ overview/ for "Abaqus Unified FEA-Complete Solutions for Realistic Simulation."
  • 31
    • 0021463798 scopus 로고
    • Precise determination of lattice parameter and thermal expansion coefficient of silicon between 300 and 1500 k
    • DOI 10.1063/1.333965
    • Y. Okada and Y. Tokumaru, J. Appl. Phys. 56 (2), 314-320 (1984). 10.1063/1.333965 (Pubitemid 14626802)
    • (1984) Journal of Applied Physics , vol.56 , Issue.2 , pp. 314-320
    • Okada Yasumasa1    Tokumaru Yozo2
  • 33
    • 33749667582 scopus 로고    scopus 로고
    • Optical flatness metrology for 300 mm silicon wafers
    • DOI 10.1063/1.2063025, CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY 2005 - International Conference
    • U. Griesmann, Q. Wang, and T. D. Raymond, AIP Conf. Proc. 788, 599 (2005). 10.1063/1.2063025 (Pubitemid 44555922)
    • (2005) AIP Conference Proceedings , vol.788 , pp. 599-603
    • Griesmann, U.1    Wang, Q.2    Raymond, T.D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.