Accurate measurement of the piezoelectric coefficient of thin films by eliminating the substrate bending effect using spatial scanning laser vibrometry

Smart Materials and Structures

Volumn 19, Issue 6, 2010, Pages

  Leighton, Glenn J T ^a   Huang, Zhaorong ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURATE MEASUREMENT; BOTTOM ELECTRODES; CONCENTRATION OF; ELASTIC COEFFICIENT; ELECTROMECHANICAL COEFFICIENTS; EXPERIMENTAL MEASUREMENTS; GEOMETRY FACTORS; LASER SCANNING VIBROMETRY; MATERIAL PROPERTY; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC FILM; PIEZOELECTRIC THIN FILMS; POISSON'S RATIO; SCANNING LASERS; SINGLE-BEAM; STRAIN DISTRIBUTIONS; SUBSTRATE BENDING; THIN FILM PIEZOELECTRIC;

ELECTRIC FIELDS; FILM THICKNESS; POISSON RATIO; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION;

PIEZOELECTRICITY;

EID: 77953564640     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/19/6/065011     Document Type: Article

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