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Thin Solid Films

Volumn 544, Issue , 2013, Pages 477-481

Influence of thermal heating on diamond-like carbon film properties prepared byfiltered cathodic arc

(3) Khamnualthong, N a,b Siangchaew, K b Limsuwan, P a,c

a KING MONGKUT'S UNIVERSITY OF TECHNOLOGY THONBURI (Thailand)

b Western Digital (Thailand) Co Ltd (Thailand)

c Thailand Ministry of Science and Technology (Thailand)

Author keywords

Diamond like carbon; FCA; Heating effect

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON FILMS; DIAMONDS; HEATING; MAGNETIC HEADS; X RAY PHOTOELECTRON SPECTROSCOPY;

ADHESION LAYER; DEPOSITED FILMS; DIAMOND LIKE CARBON; FILTERED CATHODIC ARC METHODS; HEATING EFFECT; MAGNETIC RECORDING HEADS; NANOINDENTERS; THERMAL HEATING;

DIAMOND LIKE CARBON FILMS;

EID: 84901833751 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.02.074 Document Type: Conference Paper

Times cited : (13)

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