Tetrahedral amorphous carbon films by filtered cathodic vacuum-arc deposition for air-bearing-surface overcoat

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 5 A, 2003, Pages 2824-2828

  Inaba, Hiroshi ^a   Furusawa, Kenji ^a   Hirano, Shinya ^a   Sasaki, Shinji ^a   Todoroki, Satoru ^a   Yamasaka, Minoru ^a   Endou, Masayoshi ^a  

^a HITACHI LTD   (Japan)

Author keywords

Air bearing surface overcoat; Filtered cathodic vacuum arc; Ion; Plasma; Tetrahedral amorphous carbon

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; HYDROGENATION; VACUUM;

MICRON-ORDER PARTICLES;

AMORPHOUS FILMS;

EID: 0038380741     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.2824     Document Type: Article

References (5)

1. X. Shi, B. K. Tay, H. S. Tan, Li Zhong and Y. Q. Tu: J. Appl. Phys. 79 (1996) 7234.
2. 2 and Beyond ASME, Seattle, USA, 2000, p. 43.
3. H. Hyodo, T. Yamamoto and T. Toyoguchi: IEEE Trans. Magn. 37 (2001) 1789.
4. X. Shi, B. K. Tay, H. S. Tan, E. Liu, J. Shi, L. K. Cheah and X. Jin: Thin Solid Films 345 (1999) 1.
5. H. Inaba, S. Fujimaki, S. Sasaki, S. Hirano, S. Todoroki, K. Furusawa, M. Yamasaka and X. Shi: Jpn. J. Appl. Phys. 41 (2002) 1.