Effect of the addition of nitrogen gas and annealing on the electrical properties of DLC films deposited by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD)

Journal of Ceramic Processing Research

Volumn 8, Issue 6, 2007, Pages 411-416

  Bong, Geun Choi ^a   Woo, Sik Kim ^a   Young, Ho Hong ^a   Yoon, Jong Won ^a   Sung, Chul Yi ^a   Chull, Koo Cho ^a   Kwang, Bo Shim ^a  

^a Hanyang University   (South Korea)

Author keywords

Annealing effect; Electrical conductivity; Nitrogenated diamond like carbon

Indexed keywords

EID: 38549150288     PISSN: 12299162     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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