Optical and gas sensing properties of Al-doped ZnO transparent conducting films prepared by sol-gel method under different heat treatments

Ceramics International

Volumn 40, Issue 7 PART A, 2014, Pages 9931-9939

  Liu, Xu ^a   Pan, Kaimeng ^a   Li, Weibo ^a   Hu, Dan ^a   Liu, Shuyang ^b   Wang, Yude ^a,c  

^a YUNNAN UNIVERSITY   (China)

^b HENAN NORMAL UNIVERSITY   (China)

^c ZHEJIANG UNIVERSITY   (China)

Author keywords

Al doped ZnO; C. Optical property; Gas response; Sol gel method; Thin film

Indexed keywords

EID: 84900418749     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2014.02.090     Document Type: Article

References (37)

1. J.L. West, and N.J. Halas Engineered nanomaterials for biophotonics applications: improving sensing, imaging, and therapeutics Annu. Rev. Biomed. Eng. 5 2003 285 292
2. I.H. El-Sayed, X.H. Huang, and M.A. El-Sayed Selective laser photo-thermal therapy of epithelial carcinoma using anti-EGFR antibody conjugated gold nanoparticles Cancer Lett. 239 2006 129 135
3. S.J. Pearton, D.P. Norton, K. Ip, Y. Heo, and T. Steiner Recent progress in processing and properties of ZnO Superlattices Microstruct. 34 2003 3 32
4. J.Q. Xu, Y.P. Chen, Y.D. Li, and J.N. Shen Gas sensing properties of ZnO nanorods prepared by hydrothermal method J. Mater. Sci. 40 2005 2919 2921
5. J. Zhou, N.S. Xu, and Z.L. Wang Dissolving behavior and stability of ZnO wires in biofluids: a study on biodegradability and biocompatibility of ZnO nanostructures Adv. Mater. 18 2006 2432 2435
6. O. Kluth, G. Schöpe, J. Hüpkes, C. Agashe, J. Müller, and B. Rech Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour Thin Solid Films 442 2003 80 85
7. 2 gas sensor Sens. Actuator B: Chem. 107 2005 379 386
8. E. Suvaci, and İ.Ö. Özer Processing of textured zinc oxide varistors via templated grain growth J. Eur. Ceram. Soc. 25 2005 1663 1673
9. 2+-doped ZnO nanocrystals J. Phys. Chem. B 109 2005 20232 20236
10. S. Liang, H. Sheng, Y. Liu, Z. Huo, Y. Lu, and H. Shen ZnO Schottky ultraviolet photodetectors J. Cryst. Growth 225 2001 110 113
11. N.W. Emanetoglu, C. Gorla, Y. Liu, S. Liang, and Y. Lu Epitaxial ZnO piezoelectric thin films for saw filters Mater. Sci. Semicond. Process. 2 1999 247 252
12. N. Saito, H. Haneda, T. Sekiguchi, N. Ohashi, I. Sakaguchi, and K. Koumoto Low-temperature fabrication of light-emitting zinc oxide micropatterns using self-assembled monolayers Adv. Mater. 14 2002 418 421
13. M.H. Huang, S. Mao, H. Feick, H. Yan, Y. Wu, H. Kind, E. Weber, R. Russo, and P. Yang Room-temperature ultraviolet nanowire nanolasers Science 292 2001 1897 1899
14. S.N. Yun, J.Y. Lee, J.Y. Yang, and S.W. Lim Hydrothermal synthesis of Al-doped ZnO nanorod arrays on Si substrate Physica B 405 2010 413 419
15. R.C. Wang, C.P. Liu, J.L. Huang, and S.J. Chen Single-crystalline AlZnO nanowires/nanotubes synthesized at low temperature Appl. Phys. Lett. 88 2006 023111
16. D.S. Kim, J.H. Park, B.K. Shin, K.J. Moon, M. Son, M.H. Ham, W. Lee, and J.M. Myoung Effect of deposition temperature on the properties of Al-doped ZnO films prepared by pulsed DC magnetron sputtering for transparent electrodes in thin-film solar cells Appl. Surf. Sci. 259 2012 596 599
17. W.F. Yang, Z.G. Liu, D.L. Peng, F. Zhang, H.L. Huang, Y.N. Xie, and Z.Y. Wu Al-doped ZnO films by RF magnetron sputtering method Appl. Surf. Sci. 255 2009 5669 5673
18. D.R. Sahu, S.Y. Lin, and J.L. Huang Improved properties of Al-doped ZnO film by electron beam evaporation technique Microelectron. J. 38 2007 245 250
19. Y.D. Liu, and J.S. Lian Optical and electrical properties of aluminum-doped ZnO thin films grown by pulsed laser deposition Appl. Surf. Sci. 253 2007 3727 3730
20. Y. Natsume, H. Sakata, T. Hirayama, and H. Yanagida Low-temperature conductivity of ZnO films prepared by chemical vapor deposition Jpn. J. Appl. Phys. 72 1992 4203 4207
21. A.J.C. Fiddes, K. Durose, and A.W. Brinkman Preparation of ZnO films by spray pyrolysis J. Cryst. Growth 159 1996 210 213
22. J.L. Chen, D. Chen, and Z.H. Chen Optimization of the process for preparing Al-doped ZnO thin films by sol-gel method Sci. China Ser. E: Technol. Sci. 52 2009 88 94
23. H. Wang, M.H. Xu, L. Yang, and S.J. Zhou Effects of annealing temperature and thickness on microstructure and properties of sol-gel derived multilayer Al-doped ZnO films J. Mater. Sci.: Mater. Electron. 21 2010 145 148
24. Y.S. Kim, and W.P. Tai Electrical and optical properties of Al-doped ZnO thin films by sol-gel process Appl. Surf. Sci. 253 2007 4911 4916
25. M.Z. Gao, X.N. Wu, J. Liu, and W.B. Liu The effect of heating rate on the structural and electrical properties of sol-gel derived Al-doped ZnO films Appl. Surf. Sci. 257 2011 6919 6922
26. S.W. Xue Study of ZnO:Zn phosphors prepared by sol-gel and ionimplantation techniques Phys. Procedia 25 2012 350 354
27. H. Tong, Z.H. Deng, Z.G. Liu, C.G. Huang, J.Q. Huang, H. Lan, C. Wang, and Y.G. Cao Effects of post-annealing on structural, optical and electrical properties of Al-doped ZnO thin films Appl. Surf. Sci. 257 2011 4906 4911
28. X.L. Yan, D. Hu, H.S. Li, L.X. Li, X.Y. Chong, and Y.D. Wang Nanostructure and optical properties of M doped ZnO (M=Ni, Mn) thin films prepared by sol-gel process Physica B 406 2011 3956 3962
29. Z.C. Pan, X.L. Tian, S.K. Wu, X. Yu, Z.L. Li, J.F. Deng, C.M. Xiao, G.H. Hu, and Z.G. Wei Investigation of structural, optical and electronic properties in Al-Sn co-doped ZnO thin films Appl. Surf. Sci. 265 2013 870 877
30. B. Nasr, S. Dasgupta, D. Wang, N. Mechau, R. Kruk, and H. Hahn Electrical resistivity of nanocrystalline Al-doped zinc oxide films as a function of Al content and the degree of its segregation at the grain boundaries J. Appl. Phys. 108 2010 103721 103726
31. L. Luo, M.D. Rossell, D. Xie, R. Erni, and M. Niederberger Microwave-assisted nonaqueous sol-gel synthesis: from Al:ZnO nanoparticles to transparent conducting films ACS Sustain. Chem. Eng. 1 2013 152 160
32. C.H. Kwon, H.K. Hong, D.H. Yun, K. Lee, S.T. Kim, Y.H. Roh, and B.H. Lee Thick film zinc-oxide gas sensor for the control of lean air-to-fuel ratio in domestic combustion systems Sens. Actuator B: Chem. 24 1995 610 613
33. T. Chen, Q.J. Liu, Z.L. Zhou, and Y.D. Wang The fabrication and gas-sensing characteristics of the formaldehyde gas sensors with high sensitivity Sens. Actuator B: Chem. 131 2008 301 305
34. P.P. Sahay, and R.K. Nath Al-doped ZnO thin films as methanol sensors Sens. Actuator B: Chem. 134 2008 654 659
35. C.S. Prajapati, and P.P. Sahay Alcohol-sensing characteristics of spray deposited ZnO nano-particle thin films Sens. Actuator B: Chem. 160 2011 1043 1049
36. W. Wen, J.M. Wu, and Y.D. Wang Large-size porous ZnO flakes with superior gas-sensing performance Appl. Phys. Lett. 100 2012 262111
37. W. Wen, J.M. Wu, and Y.D. Wang Flash synthesis of macro-/mesoporous ZnO for gas sensors via self-sustained decomposition of a Zn-based complex RSC Adv. 3 2013 12052 12055