Highly sensitive cantilever type chemo-mechanical hydrogen sensor based on contact resistance of self-adjusted carbon nanotube arrays

Sensors and Actuators, B: Chemical

Volumn 197, Issue , 2014, Pages 414-421

  Kim, Min Ook ^a   Lee, Kyounghoon ^a   Na, Hyungjoo ^a   Kwon, Dae Sung ^a   Choi, Jungwook ^a   Lee, Jae Ik ^a   Baek, Dae Hyun ^a   Kim, Jongbaeg ^a  

^a Yonsei University   (South Korea)

Author keywords

Cantilever; Carbon nanotube arrays; Chemo mechanical; Highly sensitive; Hydrogen sensor; Low minimum detection limit

Indexed keywords

CHEMICAL SENSORS; CONTACT RESISTANCE; ELECTRODES; HYDROGEN; NANOCANTILEVERS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

CANTILEVER; CARBON NANOTUBE ARRAY; CHEMO-MECHANICAL; HIGHLY SENSITIVE; HYDROGEN SENSOR; MINIMUM DETECTION LIMITS;

CARBON NANOTUBES;

EID: 84899421774     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2014.03.019     Document Type: Article

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