Fast and robust hydrogen sensors based on discontinuous palladium films on polyimide, fabricated on a wafer scale

Nanotechnology

Volumn 21, Issue 50, 2010, Pages

  Kiefer, T ^a   Villanueva, L G ^a   Fargier, F ^b   Favier, F ^b   Brugger, J ^a  

^a EPFL   (Switzerland)

^b UNIVERSITÉ DE MONTPELLIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AS-DEPOSITED FILMS; COMPATIBLE PROCESS; COST-EFFICIENT; ELECTRON BEAM EVAPORATION; FABRICATION PROCESS; HIGH SURFACE ENERGY; HYDROGEN SENSOR; LOW-POWER CONSUMPTION; NOMINAL THICKNESS; PALLADIUM FILMS; POLYIMIDE LAYERS; RESPONSE TIME; ROOM TEMPERATURE; STENCIL LITHOGRAPHY; VOLUME EXPANSION; WAFER SCALE;

FABRICATION; HYDROGEN; HYDROGENATION; MICROELECTRODES; POLYIMIDES; SENSORS; SURFACE CHEMISTRY;

PALLADIUM;

HYDROGEN; NANOMATERIAL; PALLADIUM; POLYIMIDE RESIN; RESIN;

ARTICLE; CHEMISTRY; ECONOMICS; ELECTROCHEMISTRY; EVALUATION; INSTRUMENTATION; METHODOLOGY; MICROELECTRODE; MICROTECHNOLOGY;

ELECTROCHEMISTRY; HYDROGEN; MICROELECTRODES; MICROTECHNOLOGY; NANOSTRUCTURES; PALLADIUM; RESINS, SYNTHETIC;

EID: 78650146663     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/50/505501     Document Type: Article

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