Rapid response microsensor for hydrogen detection using nanostructured palladium films

Sensors and Actuators, A: Physical

Volumn 163, Issue 2, 2010, Pages 464-470

  Patton, James F ^a   Hunter, Scott R ^b   Sepaniak, Michael J ^a   Daskos, Panos G ^a,b   Smith, D Barton ^b  

^a UNIVERSITY OF TENNESSEE   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Galvanic displacement; Hydrogen; Metal films; Microcantilever; Microsensor; Nanostructured; Palladium

Indexed keywords

DETECTION THRESHOLD; GALVANIC DISPLACEMENT; GAS CONDITIONING; GAS LEAK DETECTION; GASPHASE; HYDROGEN DETECTION; HYDROGEN ECONOMY; HYDROGEN GAS; HYDROGEN GAS SENSORS; INTERFERENTS; METAL FILMS; MICRO-CANTILEVERS; NANO-STRUCTURED; NANOSTRUCTURED PALLADIUM THIN FILMS; PALLADIUM FILMS; PD THIN FILMS; POROUS FILM; RAPID RESPONSE; RECOVERY TIME; RESPONSE CHARACTERISTIC; RESPONSE TIME; SENSING TECHNIQUES; SENSOR RESPONSE; STRUCTURED SURFACES; WIDE DYNAMIC RANGE;

CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; GASES; HYDROGEN; METALLIC FILMS; MICROSENSORS; PALLADIUM; THIN FILMS; VAPOR DEPOSITION;

NANOSENSORS;

EID: 78049456444     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.08.025     Document Type: Article

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