Micro-chemo-mechanical hydrogen sensor based on contact resistance of carbon nanotubes array

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 2576-2579

  Kim, M O ^a   Lee, K ^a   Na, H ^a   Kwon, D S ^a   Choi, J ^a   Lee, J I ^a   Baek, D ^a   Kim, J ^a  

^a Yonsei University   (South Korea)

Author keywords

carbon nanotubes array; chemo mechanical; contact resistance; hydrogen sensor; Low detection limit

Indexed keywords

CHEMO-MECHANICAL; DETECTION LIMITS; HYDROGEN SENSOR; LOW DETECTION LIMIT; MICRO-CANTILEVERS; ROOM TEMPERATURE; SENSING MECHANISM; SILICON ON INSULATOR WAFERS;

ACTUATORS; CONTACT RESISTANCE; HYDROGEN; MICROSYSTEMS; SILICON WAFERS; SOLID-STATE SENSORS;

CARBON NANOTUBES;

EID: 84891677703     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6627332     Document Type: Conference Paper

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