A novel accelerometer based on contact resistance of integrated carbon nanotubes

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 533-536

  Lee, Jae Ik ^a   Eun, Youngkee ^a   Jung, Han Il ^a   Choi, Jungwook ^a   Kim, Jongbaeg ^a  

^a Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EFFECTIVE CONTACT; ELECTRICAL CONTACT RESISTANCE; HIGH SENSITIVITY; SEPARATION MODES; SILICON BULK MICROMACHINING; WIDE BANDWIDTH;

ACCELEROMETERS; CARBON NANOTUBES; CONTACT RESISTANCE; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONTACTS; MECHANICAL ENGINEERING; MEMS; MICROMACHINING; REACTIVE ION ETCHING;

ACCELERATION;

EID: 79953770318     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734479     Document Type: Conference Paper

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