Metal-semiconductor-metal ion-implanted si waveguide photodetectors for c-band operation

Optics Express

Volumn 22, Issue 8, 2014, Pages 9150-9158

  Souhan, Brian ^a   Grote, Richard R ^a   Driscoll, Jeffrey B ^a   Lu, Ming ^a   Stein, Aaron ^b   Bakhru, Hassaram ^c   Osgood Jr , Richard M ^a  

^a Och Spine at New York Presbyterian Hospitals   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c SUNY POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DETECTORS; FREQUENCY RESPONSE; ION IMPLANTATION; METAL IONS; PHOTODETECTORS; PHOTONS; SILICON; WAVEGUIDES;

ABSORPTION CO-EFFICIENT; DIVACANCIES; METAL SEMICONDUCTOR METAL; PHOTONIC INTEGRATED CIRCUITS; RESPONSIVITY; SI-BASED; SI-WAVEGUIDE; SUBBAND GAP ABSORPTION;

SEMICONDUCTING SILICON;

EID: 84898969266     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.22.009150     Document Type: Article

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