CMOS compatible argon-ion-implanted C-band silicon waveguide photodetector

2013 Conference on Lasers and Electro-Optics, CLEO 2013

Volumn , Issue , 2013, Pages

  Souhan, Brian ^a   Grote, Richard R ^a   Driscoll, Jeffrey B ^a   Bakhru, Hassaram ^b   Osgood Jr , Richard M ^a  

^a Columbia University ^*  (United States)

^b STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CMOS INTEGRATED CIRCUITS; FREQUENCY RESPONSE; SILICON; WAVEGUIDES;

ARGON ION; C-BANDS; CMOS COMPATIBLE; IMPLANTATION DEFECTS; INTERNAL QUANTUM EFFICIENCY; SI-WAVEGUIDE; SILICON WAVEGUIDE;

PHOTODETECTORS;

EID: 84903772986     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1364/cleo_si.2013.cth3l.3     Document Type: Conference Paper

References (7)

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