Microfabrication of surface acoustic wave device using UV LED photolithography technique

Microelectronic Engineering

Volumn 122, Issue , 2014, Pages 9-12

  Bing, Chu Yih ^a   Mohanan, Ajay Achath ^a   Saha, Tridib ^a   Nagasundara Ramanan, Ramakrishnan ^a   Parthiban, R ^a   Ramakrishnan, N ^a  

^a MONASH UNIVERSITY MALAYSIA   (Malaysia)

Author keywords

MEMS; Microfabrication; Optical lithography; SAW devices; UV LED Lithography

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; FREQUENCY RESPONSE; LITHOGRAPHY; MANUFACTURE; MEMS; MICROANALYSIS; MICROFABRICATION; OPTIMIZATION; PHOTOLITHOGRAPHY; PHOTORESISTS; ULTRASONIC TRANSDUCERS; ULTRAVIOLET DEVICES;

EXPERIMENTAL SECTION; INTERDIGITAL TRANSDUCER; LOW-POWER CONSUMPTION; MANUFACTURING FEATURES; OPTICAL MICROSCOPES; PIEZOELECTRIC SUBSTRATES; SAW DEVICE; SURFACE ACOUSTIC WAVES;

LIGHT EMITTING DIODES;

EID: 84898664753     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2014.03.011     Document Type: Article

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