Characteristics of SAW hydrogen sensors based on InO x/ 128°YX-LiNbO 3 structures at room temperature

Sensors and Actuators, B: Chemical

Volumn 173, Issue , 2012, Pages 710-715

  Wang, Cheng ^a   Wang, Yan ^a   Zhang, Shu Yi ^a   Fan, Li ^a   Shui, Xiu Ji ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

Hydrogen sensor; InO x sensing layer; RF diode sputtering method; Surface acoustic wave

Indexed keywords

AFM; CHEMISORBED OXYGEN; FREQUENCY SHIFT; HYDROGEN SENSOR; NANO GRAINS; NATURAL AIR; PT FILMS; RESPONSE PROPERTIES; RF DIODE SPUTTERING; ROOM TEMPERATURE; SAW DELAY LINE; SENSING CHARACTERISTICS; SENSING LAYERS; SURFACE ACOUSTIC WAVES; XPS ANALYSIS; XRD;

ACOUSTIC SURFACE WAVE DEVICES; CHEMISORPTION; DEPOSITS; DIODES; HYDROGEN; PLATINUM;

SENSORS;

EID: 84867063504     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.07.072     Document Type: Article

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