A portable, benchtop photolithography system based on a solid-state light source

Small

Volumn 7, Issue 22, 2011, Pages 3144-3147

  Huntington, Mark D ^a   Odom, Teri W ^a,b  

^a Northwestern University   (United States)

^b NORTHWESTERN UNIVERSITY   (United States)

Author keywords

microfabrication; microfluidics; nanofabrication; photolithography; soft lithography

Indexed keywords

CONTACT MASKS; HIGH QUALITY; LENGTH SCALE; MICROSCALE PATTERNS; NANO SCALE; SOFT LITHOGRAPHY; SOLID-STATE LIGHT SOURCES; SYSTEM-BASED;

LIGHT SOURCES; MICROFABRICATION; MICROFLUIDICS; NANOTECHNOLOGY; PHOTOLITHOGRAPHY;

LIGHT EMITTING DIODES;

ARTICLE; INSTRUMENTATION; METHODOLOGY; MICROFLUIDICS; SCANNING ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION;

MICROFLUIDICS; MICROSCOPY, ELECTRON, SCANNING; ULTRAVIOLET RAYS;

EID: 81255191887     PISSN: 16136810     EISSN: 16136829     Source Type: Journal    
DOI: 10.1002/smll.201101209     Document Type: Article

References (29)

1. M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd edition, CRC Press, Boca Raton 2002.
2. H. Daiguji, Chem. Soc. Rev. 2010, 39, 901.
3. Y. Xia, J. A. Rogers, K. E. Paul, G. M. Whitesides, Chem. Rev. 1999, 99, 1823.
4. D. B. Wolfe, D. Qin, G. M. Whitesides, Methods Mol. Biol. 2010, 583, 81.
5. E. M. Lucchetta, J. H. Lee, L. A. Fu, N. H. Patel, R. F. Ismagilov, Nature 2005, 434, 1134.
6. J. Henzie, M. H. Lee, T. W. Odom, Nat. Nanotechnol. 2007, 549.
7. Philips Lumileds, Evaluating the Lifetime Behavior of LED Systems, Philips Inc. White Paper, 2004, 1-16.
8. J. Y. Zhan, I. W. Boyd, Appl. Surf. Sci. 2000, 168, 296.
9. Microposit s1800 series photoresist, Material Data Sheet, (accessed February 2011).
10. Spectronics SB-100P Series UV Lamp, specifications sheet, (accessed June 2011).
11. Süss MicroTec MA/BA6 Mask Aligner, specifications sheet, (accessed June 2011).
12. Panasonic LTH4 Timer, specifications sheet, (accessed June 2011).
13. T. A. Brunner, Proc. SPIE 1991, 1466, 297.
14. J. A. Rogers, K. E. Paul, R. J. Jackman, G. M. Whitesides, Appl. Phys. Lett. 1997, 70, 2658.
15. T. W. Odom, J. C. Love, D. B. Wolfe, K. E. Paul, G. M. Whitesides, Langmuir 2002, 18, 5314.
16. M. H. Lee, M. D. Huntington, W. Zhou, J. C. Yang, T. W. Odom, Nano Lett. 2010, 11, 311.
17. T. W. Odom, V. R. Thalladi, J. C. Love, G. M. Whitesides, J. Am. Chem. Soc. 2002, 124, 12112.
18. J. Henzie, J. Lee, M. H. Lee, W. Hasan, T. W. Odom, Annu. Rev. Phys. Chem. 2009, 60, 147.
19. J. A. Rogers, R. G. Nuzzo, Mater. Today 2005, 8, 50.
20. H. Gao, J. C. Yang, J. Y. Lin, A. D. Stuparu, M. H. Lee, M. Mrksich, T. W. Odom, Nano Lett. 2010, 10, 2549.
21. H. Gao, J. Henzie, T. W. Odom, Nano Lett. 2006, 6, 2104.
22. H. Gao, J. Henzie, M. H. Lee, T. W. Odom, Proc. Natl. Acad. Sci. USA 2008, 105, 20146.
23. J. P. Rolland, B. W. Maynor, L. E. Euliss, A. E. Exner, G. M. Denison, J. M. DeSimone, J. Am. Chem. Soc. 2005, 127, 10096.
24. D. B. Weibel, W. R. DiLuzio, G. M. Whitesides, Nat. Rev. Microbiol. 2007, 5, 209.
25. H. Wu, T. W. Odom, G. M. Whitesides, Anal. Chem. 2002, 74, 3267.
26. M. H. Wu, G. M. Whitesides, Appl. Phys. Lett. 2001, 78, 2273.
27. G. M. Whitesides, Nature 2006, 442, 369.
28. H. A. Stone, A. D. Stroock, A. Ajdari, Annu. Rev. Fluid Mech. 2004, 36, 381.
29. S. P. Price, J. Henzie, T. W. Odom, Small 2007, 3, 372.