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Volumn 22, Issue 3, 2014, Pages 346-355

Structural analyses of seeded thin film microcrystalline silicon solar cell

Author keywords

crystallinity profile; seed layers; spectral response; thin film microcrystalline silicon

Indexed keywords

AMORPHOUS FILMS; CRACKS; CRYSTAL ORIENTATION; DEPOSITION; FILM GROWTH; GRAIN SIZE AND SHAPE; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MICROCRYSTALLINE SILICON; OPEN CIRCUIT VOLTAGE; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SOLAR CELLS; THIN FILM SOLAR CELLS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION; X RAY DIFFRACTION;

EID: 84897907936     PISSN: 10627995     EISSN: 1099159X     Source Type: Journal    
DOI: 10.1002/pip.2274     Document Type: Article
Times cited : (7)

References (23)
  • 1
    • 0001650492 scopus 로고    scopus 로고
    • Evolutionary phase diagrams for plasma-enhanced chemical vapor deposition of silicon thin films from hydrogen-diluted silane
    • Koh J, Ferlauto AS, Rovira PI, Wronski CR, Collins RW,. Evolutionary phase diagrams for plasma-enhanced chemical vapor deposition of silicon thin films from hydrogen-diluted silane. Applied Physics Letters 1999; 75: 2286-2288.
    • (1999) Applied Physics Letters , vol.75 , pp. 2286-2288
    • Koh, J.1    Ferlauto, A.S.2    Rovira, P.I.3    Wronski, C.R.4    Collins, R.W.5
  • 2
    • 79956057171 scopus 로고    scopus 로고
    • Extended phase diagrams for guiding plasma-enhanced chemical vapor deposition of silicon thin films for photovoltaic applications
    • Ferlauto AS, Koval RJ, Wronski CR, Collins RW,. Extended phase diagrams for guiding plasma-enhanced chemical vapor deposition of silicon thin films for photovoltaic applications. Applied Physics Letters 2002; 80: 2666-2668.
    • (2002) Applied Physics Letters , vol.80 , pp. 2666-2668
    • Ferlauto, A.S.1    Koval, R.J.2    Wronski, C.R.3    Collins, R.W.4
  • 3
    • 0034904138 scopus 로고    scopus 로고
    • Real-time spectroscopic ellipsometry studies of the nucleation and grain growth processes in microcrystalline silicon thin films
    • Fujiwara H, Kondo M, Matsuda A, Real-time spectroscopic ellipsometry studies of the nucleation and grain growth processes in microcrystalline silicon thin films. Physical Review B 2001; 63: 115306-115314.
    • (2001) Physical Review B , vol.63 , pp. 115306-115314
    • Fujiwara, H.1    Kondo, M.2    Matsuda, A.3
  • 6
    • 15744396854 scopus 로고    scopus 로고
    • Lowering of thickness of boron-doped microcrystalline hydrogenated silicon film by seeding technique
    • Sarker A, Banerjee C, Barua AK,. Lowering of thickness of boron-doped microcrystalline hydrogenated silicon film by seeding technique. Solar Energy Materials and Solar Cells 2005; 86: 365-371.
    • (2005) Solar Energy Materials and Solar Cells , vol.86 , pp. 365-371
    • Sarker, A.1    Banerjee, C.2    Barua, A.K.3
  • 7
    • 0001904230 scopus 로고    scopus 로고
    • Growth of amorphous-layer-free microcrystalline silicon on insulating glass substrates by plasma-enhanced chemical vapor deposition
    • Zhou J, Ikuta K, Yasuda T, Umeda T, Yamasaki S, Tanaka K,. Growth of amorphous-layer-free microcrystalline silicon on insulating glass substrates by plasma-enhanced chemical vapor deposition. Applied Physics Letters 1997; 71: 1534-1536.
    • (1997) Applied Physics Letters , vol.71 , pp. 1534-1536
    • Zhou, J.1    Ikuta, K.2    Yasuda, T.3    Umeda, T.4    Yamasaki, S.5    Tanaka, K.6
  • 8
    • 0037416716 scopus 로고    scopus 로고
    • Preparation of microcrystalline silicon seed-layers with defined structural properties
    • Vetterl O, Hulsbeck M, Wolff J, Carius R, Finger F,. Preparation of microcrystalline silicon seed-layers with defined structural properties. Thin Solid Films 2003; 427: 46-50.
    • (2003) Thin Solid Films , vol.427 , pp. 46-50
    • Vetterl, O.1    Hulsbeck, M.2    Wolff, J.3    Carius, R.4    Finger, F.5
  • 9
    • 18844435138 scopus 로고    scopus 로고
    • Effects of seeding methods on the fabrication of microcrystalline silicon solar cells using radio frequency plasma enhanced chemical vapor deposition
    • Li Y, Li L, Anna Selvan J, Delahoy A, Levy R,. Effects of seeding methods on the fabrication of microcrystalline silicon solar cells using radio frequency plasma enhanced chemical vapor deposition. Thin Solid Films 2005; 483: 84-88.
    • (2005) Thin Solid Films , vol.483 , pp. 84-88
    • Li, Y.1    Li, L.2    Anna Selvan, J.3    Delahoy, A.4    Levy, R.5
  • 10
    • 0242581692 scopus 로고    scopus 로고
    • Microcrystalline silicon thin films grown by plasma enhanced chemical vapor deposition - Growth mechanisms and grain size control
    • Roca i Cabarrocas P, Fontcuberta A, Kalache B, Kasouit S,. Microcrystalline silicon thin films grown by plasma enhanced chemical vapor deposition-growth mechanisms and grain size control. Solid State Phenomena 2003; 93: 257-268.
    • (2003) Solid State Phenomena , vol.93 , pp. 257-268
    • Roca Cabarrocas, P.1    Fontcuberta, A.2    Kalache, B.3    Kasouit, S.4
  • 14
    • 43049127207 scopus 로고    scopus 로고
    • Preparation of microcrystalline silicon solar cells on microcrystalline silicon carbide window layers grown with HWCVD at low temperature
    • Huang Y, Chen T, Gordijn A, Dasgupta A, Finger F, Carius R,. Preparation of microcrystalline silicon solar cells on microcrystalline silicon carbide window layers grown with HWCVD at low temperature. Journal of Non-Crystalline Solids 2008; 354: 2430-2434.
    • (2008) Journal of Non-Crystalline Solids , vol.354 , pp. 2430-2434
    • Huang, Y.1    Chen, T.2    Gordijn, A.3    Dasgupta, A.4    Finger, F.5    Carius, R.6
  • 15
    • 45849116953 scopus 로고    scopus 로고
    • The open-circuit voltage in microcrystalline silicon solar cells of different degrees of crystallinity
    • Madhumita N, Roca i Cabarrocas P, Johnson EV, Abramov A, Chatterjee P,. The open-circuit voltage in microcrystalline silicon solar cells of different degrees of crystallinity. Thin Solid Films 2008; 516: 6974-6978.
    • (2008) Thin Solid Films , vol.516 , pp. 6974-6978
    • Madhumita, N.1    Roca Cabarrocas, P.2    Johnson, E.V.3    Abramov, A.4    Chatterjee, P.5
  • 16
    • 36449002695 scopus 로고
    • Substrate selectivity in the formation of microcrystalline silicon: Mechanisms and technological consequences
    • Roca i Cabarrocas P, Layadi N, Heitz T, Drevillon B, Solomon I,. Substrate selectivity in the formation of microcrystalline silicon: mechanisms and technological consequences. Applied Physics Letters 1995; 66: 3609-3611.
    • (1995) Applied Physics Letters , vol.66 , pp. 3609-3611
    • Roca Cabarrocas, P.1    Layadi, N.2    Heitz, T.3    Drevillon, B.4    Solomon, I.5
  • 20
    • 0002965536 scopus 로고
    • A rapid method for analyzing the breadths of diffraction and spectral lines using the Voigt function
    • Langford JI,. A rapid method for analyzing the breadths of diffraction and spectral lines using the Voigt function. Journal of Applied Crystallography 1978; 11: 10-14.
    • (1978) Journal of Applied Crystallography , vol.11 , pp. 10-14
    • Langford, J.I.1
  • 21
    • 2342601217 scopus 로고
    • Determination of crystallite size and lattice distortions through x-ray diffraction line profile analysis
    • Delhez R, Keijser TH, Mittemeijer EJ,. Determination of crystallite size and lattice distortions through x-ray diffraction line profile analysis. Fresenius' Journal of Analytical Chemistry 1982; 312: 1-16.
    • (1982) Fresenius' Journal of Analytical Chemistry , vol.312 , pp. 1-16
    • Delhez, R.1    Keijser, T.H.2    Mittemeijer, E.J.3
  • 22
    • 77953137018 scopus 로고    scopus 로고
    • A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness
    • Mullerova J, Prusakova L, Netrvalova M, Vavrunkova V, Sutta P,. A study of optical absorption in amorphous hydrogenated silicon thin films of varied thickness. Applied Surface Science 2010; 256: 5667-5671.
    • (2010) Applied Surface Science , vol.256 , pp. 5667-5671
    • Mullerova, J.1    Prusakova, L.2    Netrvalova, M.3    Vavrunkova, V.4    Sutta, P.5
  • 23
    • 56549112149 scopus 로고    scopus 로고
    • Microstrain and grain-size analysis from diffraction peak width and graphical derivation of high-pressure thermomechanics
    • Zhao Y, Zhang J,. Microstrain and grain-size analysis from diffraction peak width and graphical derivation of high-pressure thermomechanics. Journal of Applied Crystallography 2008; 41: 1095-1108.
    • (2008) Journal of Applied Crystallography , vol.41 , pp. 1095-1108
    • Zhao, Y.1    Zhang, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.