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Volumn 14, Issue 9, 2014, Pages 1614-1621
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A novel hybrid patterning technique for micro and nanochannel fabrication by integrating hot embossing and inverse UV photolithography
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Author keywords
[No Author keywords available]
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Indexed keywords
BIOMEDICAL AND DENTAL MATERIALS;
MICROCHANNEL;
NANOCHANNEL;
OXYGEN;
UNCLASSIFIED DRUG;
WATER;
ACCURACY;
ARTICLE;
CONTACT ANGLE;
CONTROLLED STUDY;
HOT EMBOSSING AND INVERSE ULTRAVIOLET PHOTOLITHOGRAPHY;
MEDICAL TECHNOLOGY;
MICROTECHNOLOGY;
NANOCHIP;
NANOFABRICATION;
NANOFLUIDIC CHIP;
NANOFLUIDICS;
PRIORITY JOURNAL;
TEMPERATURE;
TIME;
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EID: 84897538710
PISSN: 14730197
EISSN: 14730189
Source Type: Journal
DOI: 10.1039/c3lc51369f Document Type: Article |
Times cited : (48)
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References (32)
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