An occupational exposure assessment for engineered nanoparticles used in semiconductor fabrication

Annals of Occupational Hygiene

Volumn 58, Issue 2, 2014, Pages 251-265

  Shepard, Michele Noble ^a   Brenner, Sara ^a  

^a SUNY POLYTECHNIC INSTITUTE   (United States)

Author keywords

CMP; exposure assessment; nanoparticle; semiconductor

Indexed keywords

AEROSOL; AIR POLLUTANT; ALUMINUM OXIDE; INFUSORIAL EARTH; NANOPARTICLE;

AEROSOL; AIR POLLUTANT; ANALYSIS; CHEMISTRY; DEVICES; ENVIRONMENTAL MONITORING; EXPOSURE; FILTRATION; HUMAN; OCCUPATIONAL EXPOSURE; PROCEDURES; SEMICONDUCTOR; SPECTROMETRY; STANDARDS; TRANSMISSION ELECTRON MICROSCOPY; ULTRASTRUCTURE; WORKPLACE;

AEROSOLS; AIR POLLUTANTS, OCCUPATIONAL; ALUMINUM OXIDE; DIATOMACEOUS EARTH; ENVIRONMENTAL MONITORING; FILTRATION; HUMANS; INHALATION EXPOSURE; MICROSCOPY, ELECTRON, TRANSMISSION; NANOPARTICLES; OCCUPATIONAL EXPOSURE; SEMICONDUCTORS; SPECTROMETRY, X-RAY EMISSION; WORKPLACE;

EID: 84894282404     PISSN: 00034878     EISSN: 14753162     Source Type: Journal    
DOI: 10.1093/annhyg/met064     Document Type: Article

References (52)

1. Abbott LC, Maynard AD. (2010) Exposure assessment approaches for engineered nanomaterials. Risk Anal; 30: 1634-44.
2. Borm PJ, Robbins D, Haubold S et al. (2006) The potential risks of nanomaterials: a review carried out for ECETOC. Part Fibre Toxicol; 3: 11.
3. Brouwer D, Berges M, Virji MA et al. (2012) Harmonization of measurement strategies for exposure to manufactured nanoobjects; report of a workshop. Ann Occup Hyg; 56: 1-9.
4. Brouwer DH, Gijsbers JH, Lurvink MW. (2004) Personal exposure to ultrafine particles in the workplace: exploring sampling techniques and strategies. Ann Occup Hyg; 48: 439-53. Available at http://annhyg. oxfordjournals.org/content/ 48/5/439.full.pdf+html. Accessed 23 January 23 2012.
5. Brouwer DH, van Duuren-Stuurman B, Berges M et al. (2009) From workplace air monitoring results towards estimates of exposure: development of a strategy to assess exposure to manufactured nano-objects. J Nanopart Res; 11: 1867-81.
6. Brown DM, Wilson MR, MacNee W et al. (2001) Sizedependent proinflammatory effects of ultrafine polystyrene particles: a role for surface area and oxidative stress in the enhanced activity of ultrafines. Toxicol Appl Pharmacol; 175: 191-9.
7. BSI, British Standards Institute. (2007) Nanotechnologies - Part 2. Guide to safe handling and disposal of manufactured nanomaterials. PD 6699-2:2007.
8. Cena LG, Peters TM. (2011) Characterization and control of airborne particles emitted during production of epoxy/carbon nanotube nanocomposites. J Occup Environ Hyg; 8: 86-92.
9. Corbett M. (2013) Trends for CMP slurries and pads for new devices and wafers. In Innovations in CMP Materials.
10. American Vacuum Society CMP User Group May 2013 Proceedings. Available at http://www.avsusergroups.org/ cmpug/cmp2013-5proceedings.htm. Accessed 5 June 2013.
11. Curwin B, Bertke S. (2011) Exposure characterization of metal oxide nanoparticles in the workplace. J Occup Environ Hyg; 8: 580-7.
12. Dahm MM, Evans DE, Schubauer-Berigan MK et al. (2013) Occupational exposure assessment in carbon nanotube and nanofiber primary and secondary manufacturers: mobile direct-reading sampling. Ann Occup Hyg; 57: 328-44.
13. Demou E, Peter P, Hellweg S. (2008) Exposure to manufactured nanostructured particles in an industrial pilot plant. Ann Occup Hyg; 52: 695-706.
14. Demou E, Stark WJ, Hellweg S. (2009) Particle emission and exposure during nanoparticle synthesis in research laboratories. Ann Occup Hyg; 53: 829-38.
15. Donaldson K, Stone V, Duffin R et al. (2001) The quartz hazard: effects of surface and matrix on inflammogenic activity. J Environ Pathol Toxicol Oncol; 20 (Suppl. 1): 109-18.
16. Duffin R, Tran L, Brown D et al. (2007) Proinflammogenic effects of low-toxicity and metal nanoparticles in vivo and in vitro: highlighting the role of particle surface area and surface reactivity. Inhal Toxicol; 19: 849-56.
17. Elihn K, Berg P. (2009) Ultrafine particle characteristics in seven industrial plants. Ann Occup Hyg; 53: 475-84.
18. Evans DE, Ku BK, Birch ME et al. (2010) Aerosol monitoring during carbon nanofiber production: mobile direct-reading sampling. Ann Occup Hyg; 54: 514-31.
19. Fubini B, Ghiazza M, Fenoglio I. (2010) Physico-chemical features of engineered nanoparticles relevant to their toxicity. Nanotoxicology; 4: 347-63.
20. IFA. (2009) Nanoparticles at the workplace: Criteria for assessment of the effectiveness of protective measures. Available at http://www.dguv.de/ifa/ en/fac/nanopartikel/beurteilungsmassstaebe/ index.jsp. Accessed 31 October 2012.
21. Jiang J, Oberdörster G, Elder A et al. (2008) Does nanoparticle activity depend upon size and crystal phase? Nanotoxicology; 2: 33-42.
22. Kato T, Yashiro T, Murata Y et al. (2003) Evidence that exogenous substances can be phagocytized by alveolar epithelial cells and transported into blood capillaries. Cell Tissue Rec; 311: 47-51.
23. Klein Entink R, Fransman W, Brouwer D. (2011). How to statistically analyze nano exposure measurement results: using an ARIMA time series approach. J Nanopart Res; 13: 6991-7004.
24. Koivisto AJ, Lyyränen J, Auvinen A et al. (2012) Industrial worker exposure to airborne particles during the packing of pigment and nanoscale titanium dioxide. Inhal Toxicol; 24: 839-49.
25. Krishnan M, Nalaskowski JW, Cook LM. (2010) Chemical mechanical planarization: slurry chemistry, materials, and mechanisms. Chem Rev; 110: 178-204.
26. Kuhlbusch TA, Asbach C, Fissan H et al. (2011) Nanoparticle exposure at nanotechnology workplaces: a review. Part Fibre Toxicol; 8: 22.
27. Li XY, Gilmour PS, Donaldson K et al. (1996) Free radical activity and pro-inflammatory effects of particulate air pollution (PM10) in vivo and in vitro. Thorax. 12: 1216-22. Available at http://www.ncbi.nlm.nih.gov/pmc/ articles/ PMC472766/pdf/thorax00331-0056.pdf. Accessed 12 November 2012.
28. Matijević E, Babu SV. (2008) Colloid aspects of chemicalmechanical planarization. J Colloid Interface Sci; 320: 219-37.
29. Maynard AD, Aitken RJ. (2007) Assessing exposure to airborne nanomaterials: current abilities and future requirements. Nanotoxicology; 1: 26-41.
30. Methner M, Hodson L, Geraci C. (2010) Nanoparticle emission assessment technique (NEAT) for the identification and measurement of potential inhalation exposure to engineered nanomaterials-part A. J Occup Environ Hyg; 7: 127-32.
31. Monteiller C, Tran L, MacNee W et al. (2007) The pro-inflammatory effects of low-toxicity low-solubility particles, nanoparticles and fine particles, on epithelial cells in vitro: the role of surface area. Occup Environ Med; 64: 609-15.
32. National Institute for Occupational Safety and Health (NIOSH), US Centers for Disease Control. (2009) Approaches to safe nanotechnology: managing the health and safety concerns associated with engineered nanoparticles, NIOSH 2009-125. Available at http://www.cdc.gov/ niosh/docs/2009-125/pdfs/2009-125. pdf. Accessed 08 September 2010.
33. Nel A, Xia T, Mädler L et al. (2006) Toxic potential of materials at the nanolevel. Science; 311: 622-7.
34. NIOSH, US Centers for Disease Control. (2011) Current Intelligence Bulletin 63: occupational exposure to titanium dioxide, NIOSH 2011-160. Available at http://www.cdc. gov/niosh/docs/2011-160/pdfs/2011-160.pdf. Accessed 12 May 2011.
35. Noël K, Maghni Y, Cloutier C et al. (2012) Effects of inhaled nano-TiO2 aerosols showing two distinct agglomeration states on rat lungs. Toxicol Lett; 214: 109-19.
36. Oberdorster G. (1996) Significance of particle parameters in the evaluation of exposure-dose-response relationships of inhaled particles. Inhal Toxicol; 8: 73-89.
37. Oberdörster G. (2010) Safety assessment for nanotechnology and nanomedicine: concepts of nanotoxicology. J Intern Med; 267: 89-105.
38. Oberdörster G, Ferin J, Gelein R et al. (1992) Role of the alveolar macrophage in lung injury: studies with ultrafine particles. Environ Health Perspect. 97: 193-99.
39. Oberdörster G, Ferin J, Lehnert BE. (1994) Correlation between particle size, in vivo particle persistence, and lung injury. Environ Health Perspect; 102 (Suppl. 5): 173-9.
40. Oberdörster G, Maynard A, Donaldson K et al.; ILSI Research Foundation/Risk Science Institute Nanomaterial Toxicity Screening Working Group. (2005a) Principles for characterizing the potential human health effects from exposure to nanomaterials: elements of a screening strategy. Part Fibre Toxicol; 2: 8.
41. Oberdörster G, Oberdörster E, Oberdörster J. (2005b) Nanotoxicology: an emerging discipline evolving from studies of ultrafine particles. Environ Health Perspect; 113: 823-39.
42. Park J, Kwak BK, Bae E, et al. (2009) Characterization of exposure to silver nanoparticles in a manufacturing facility. J Nanopart Res; 11:1705-12.
43. Peters TM, Elzey S, Johnson R et al. (2009) Airborne monitoring to distinguish engineered nanomaterials from incidental particles for environmental health and safety. J Occup Environ Hyg; 6: 73-81.
44. Schulte P, Geraci C, Zumwalde R et al. (2008) Occupational risk management of engineered nanoparticles. J Occup Environ Hyg; 5: 239-49.
45. Schulte PA, Murashov V, Zumwalde R. (2010) Occupational exposure limits for nanomaterials: state of the art. J Nanopart Res; 12:1971-87. Available at http://www.nanoarchive.org/9468/1/Occupational-exposure-limits-for- nanomaterials-state-of-the-art.pdf. Accessed 18 July 2011.
46. Tsai SJ, Ada E, Isaacs JA et al. (2009) Airborne nanoparticle exposures associated with the manual handling of nanoalumina and nanosilver in fume hoods. J Nanopart Res; 11: 147-61.
47. van Broekhuizen P, Dorbeck-Jung B. (2013) Exposure limit values for nanomaterials-capacity and willingness of users to apply a precautionary approach. J Occup Environ Hyg; 10: 46-53.
48. van Broekhuizen P, van Broekhuizen F, Cornelissen R et al. (2012) Workplace exposure to nanoparticles and the application of provisional nanoreference values in times of uncertain risks. J Nanopart Res; 14:1-25.
49. van Broekhuizen P, van Veelen W, Streekstra WH et al. (2012) Exposure limits for nanoparticles: report of an international workshop on nano reference values. Ann Occup Hyg; 56: 515-24.
50. Warheit DB, Borm PJ, Hennes C et al. (2007) Testing strategies to establish the safety of nanomaterials: conclusions of an ECETOC workshop. Inhal Toxicol; 19: 631-43.
51. Warheit DB, Brock WJ, Lee KP et al. (2005) Comparative pulmonary toxicity inhalation and instillation studies with different TiO2 particle formulations: impact of surface treatments on particle toxicity. Toxicol Sci; 88: 514-24.
52. Zantye PB, Kumar A, Sikder AK. (2004) Chemical mechanical planarization for microelectronics applications. Mater Sci Eng; 45: 89-220.