Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system

Surface and Coatings Technology

Volumn 241, Issue , 2014, Pages 38-44

  Vergöhl, Michael ^a   Rademacher, Daniel ^a   Pflug, Andreas ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Cylindrical magnetrons; High precision optical filters; Particles; Reactive magnetron sputtering; Uniformity

Indexed keywords

EID: 84894067176     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2013.11.033     Document Type: Article

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