Numerical shaper optimization for sputtered optical precision filters

Chinese Optics Letters

Volumn 11, Issue SUPPL.1, 2013, Pages

  Pflug, Andreas ^a   Siemers, Michael ^a   Melzig, Thomas ^a   Rademacher, Daniel ^a   Zickenrott, Tobias ^a   Vergöhl, Michael ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONCEPT-BASED; EXPERIMENTAL DATUM; METAL FLUXES; OPTIMIZATION PROCEDURES; PARTICLE FLUXES; SIMULATION MODEL;

COMPUTER SIMULATION; FILM THICKNESS;

OPTIMIZATION;

EID: 84881567928     PISSN: 16717694     EISSN: None     Source Type: Journal    
DOI: 10.3788/COL201311.S10204     Document Type: Article

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