The use of ac power on cylindrical magnetrons

Journal of Non-Crystalline Solids

Volumn 218, Issue , 1997, Pages 35-37

  Hill, Russell J ^a   Jansen, Frank ^a  

^a BOC Coaling Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POWER SUPPLIES TO APPARATUS; HISTORY; MAGNETRONS;

CYLINDRICAL MAGNETRONS; REACTIVE SPUTTERING;

MAGNETRON SPUTTERING;

EID: 0031549313     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(97)00195-6     Document Type: Article

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