SCOPUS 정보 검색 플랫폼

Chinese Optics Letters

Volumn 8, Issue SUPPL., 2010, Pages 38-43

Manufacturing of precision optical coatings

(3) Tilsch, Markus K a Grigonis, Marius a Ockenfuss, Georg J a

a JDS UNIPHASE (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVE PARTS; COMPLEX SYSTEMS; GAS DELIVERY; HEIGHT VARIATION; LAYER THICKNESS; MANUFACTURING PRECISION; MULTIPLE SUBSYSTEMS; OPTICAL ELEMENTS; PHYSICAL VAPOR DEPOSITION PROCESS; PRECISION COATINGS; PROCESS GAS; PROCESS INSTABILITIES; ROTARY MOTIONS; SOURCE SYSTEMS; SPECTRAL FEATURE; TIGHT TOLERANCES; VACUUM CHAMBERS;

PHYSICAL VAPOR DEPOSITION; SUBSTRATES; VACUUM EVAPORATION;

OPTICAL COATINGS;

EID: 77953251982 PISSN: 16717694 EISSN: None Source Type: Journal
DOI: 10.3788/COL20100801.0038 Document Type: Article

Times cited : (5)

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