Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam

Sensors and Actuators, A: Physical

Volumn 121, Issue 1, 2005, Pages 16-21

  Fujita, Takayuki ^a   Maenaka, Kazusuke ^a   Takayama, Yoichiro ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Double gimbal; Galvano mirror; MEMS; Soft torsion beam; SU 8

Indexed keywords

ALUMINUM; APPROXIMATION THEORY; EPOXY RESINS; MAGNETIC FIELDS; MICROELECTROMECHANICAL DEVICES; SILICON; SINGLE CRYSTALS; STABILITY; STRAIN;

DOUBLE-GIMBAL; GALVANO MIRRORS; SOFT TORSION BEAMS; SU-8;

MIRRORS;

EID: 21744439706     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.01.029     Document Type: Article

References (6)

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