Modeling and experimental study of molecular nitrogen dissociation in an Ar-N2 ICP discharge

Plasma Sources Science and Technology

Volumn 20, Issue 4, 2011, Pages

  Kang, Namjun ^a,b   Gaboriau, Freddy ^a,b   Oh, Soo Ghee ^c   Ricard, André ^a,b  

^a d'Hydraulique et des Telecommunications   (France)

^b CNRS   (France)

^c Ajou University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOM DENSITY; DISCHARGE CONDITIONS; DISSOCIATION RATES; DISSOCIATIVE RECOMBINATIONS; ELECTRON IMPACT DISSOCIATION; EMISSION INTENSITY; ENERGY BALANCE EQUATIONS; EXCITED LEVELS; EXPERIMENTAL STUDIES; HIGH DENSITY; HIGH PRESSURE; LASER INDUCED FLUORESCENCE; LOSS RATES; LOW PRESSURES; MEASUREMENT RESULTS; MODEL CALCULATIONS; MOLECULAR NITROGEN; NITROGEN ATOM; NITROGEN DISCHARGES; NITROGEN MOLECULE; PARTICLE DENSITIES; PLASMA PARAMETER; SET-UP CONDITIONS; STAINLESS STEEL WALLS; SURFACE-STICKING COEFFICIENTS; TWO-PHOTON ABSORPTIONS;

ABSORPTION SPECTROSCOPY; ARGON LASERS; ATOMIC SPECTROSCOPY; ATOMS; CHARGE TRANSFER; ELECTRON ENERGY LOSS SPECTROSCOPY; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; ION EXCHANGE; NITROGEN; NITROGEN PLASMA; OPTICAL EMISSION SPECTROSCOPY; PHOTODISSOCIATION; STAINLESS STEEL; TWO PHOTON PROCESSES;

ELECTRIC DISCHARGES;

EID: 80051608681     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/4/045015     Document Type: Article

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