Evaluation of the rotational temperature in N2 discharges using low-resolution spectroscopy

Measurement Science and Technology

Volumn 11, Issue 4, 2000, Pages 333-341

  Gardet, G ^a   Moulard, G ^a   Courbon, M ^a   Rogemond, F ^a   Druetta, M ^a  

^a UNIVERSITÉ JEAN MONNET   (France)

Author keywords

Low resolution spectrometer; Rotational temperature of nitrogen; Thin film process

Indexed keywords

BAND STRUCTURE; MAGNETRONS; NITROGEN; SPECTROSCOPIC ANALYSIS; THERMOANALYSIS;

LOW-RESOLUTION SPECTROSCOPY;

PLASMAS;

GAS; NITROGEN; PLASMA JET; TEMPERATURE MEASUREMENT;

EID: 0034013035     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/4/301     Document Type: Article

References (16)

1. Bastien F, Hua Wu Jiang, Goguillon P and Marode E 1990 J. Phys. 23 813
2. Kersch A, Morokoff W and Werner Ch 1994 J. Appl. Phys. 75 2278
3. Ricard A 1993 Surf. Coatings Technol. 59 67
4. Czernichowski A 1987 J. Phys. D: Appl. Phys. 20 559
5. Sahli K, Hochard L and Pointu A M 1993 Meas. Sci. Technol. 4 685
6. Pellerin S, Cormier J M, Richard F, Musiol K and Chapelle J 1996 J. Phys. D: Appl. Phys. 29 726
7. Drachev A I and Lavrov B P 1988 Teplofiz. Vys. Temp. 26 147
8. Porter R A and Harshbarger W R 1979 J. Electrochem. Soc. 126 460
9. Nassar H and Czernichowski A 1990 J. Physique Coll. 51 C5, suppl 18 289
10. Gomes A M, Bacri J, Sarrette J P and Salon J 1992 J. Anal. At. Spectrosc. 7 1103
11. Simek M and De Benedictis S 1995 Plasma Chem. Plasma Proc. 15 451
12. Herzberg G 1950 Molecular Spectra and Molecular Structure I: Spectra of Diatomic Molecules (New York: Van Nostrand)
13. Torkington P 1980 Appl. Spectrosc. 34 189-93
14. Repoux M 1991 Thèse Ecole Centrale de Paris
15. Laux C O and Kruger C H 1992 J. Quant. Spectrosc. Radiat. Transfer 48 9
16. Setra M, Courbon M, Motyl G, Druetta M, Ouerdane Y, Terrat J P and Martin M 1994 Proc. 4ème Congrès de la Section Plasma, SFP, Toulouse, 14-18 September