SCOPUS 정보 검색 플랫폼

Volumn 44, Issue 29, 2011, Pages

The spatially resolved measurements of the atomic densities in argon Paschen 1s levels by OES in a capacitively coupled plasma

(4) Li, Jiang a Liu, Fei Xiang a Zhu, Xi Ming a Pu, Yi Kang a

a TSINGHUA UNIVERSITY (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC DENSITY; BRANCHING FRACTIONS; BULK PLASMA; CAPACITIVELY COUPLED PLASMAS; ESCAPE FACTORS; METASTABLE LEVELS; POWER ELECTRODES; RESONANCE LEVELS; SPATIAL PROFILES; SPATIALLY RESOLVED;

INDUCTIVELY COUPLED PLASMA; RESONANCE;

ARGON;

EID: 79960219378 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/44/29/292001 Document Type: Article

Times cited : (22)

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