A rotary comb-actuated microgripper with a large displacement range

Microsystem Technologies

Volumn 20, Issue 1, 2014, Pages 119-126

  Chang, Honglong ^a   Zhao, Haitao ^a   Ye, Fang ^a   Yuan, Guangmin ^a   Xie, Jianbing ^a   Kraft, Michael ^b   Yuan, Weizheng ^a  

^a NORTHWESTERN POLYTECHNICAL UNIVERSITY   (China)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; COMB ACTUATOR; CONVERSION SYSTEMS; DRIVING VOLTAGES; LARGE DISPLACEMENTS; MICRO GRIPPER; MICRO-OBJECT MANIPULATION; STRUCTURAL LAYERS;

HARDWARE; MICROSYSTEMS;

GRIPPERS;

EID: 84892587701     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-013-1737-8     Document Type: Article

References (14)

1. Agnus J, Nectoux P, Chaillet N (2005) Overview of microgrippers and design of a micromanipulation station based on a MMOC microgripper. In: 2005 IEEE international symposium on computational intelligence in robotics and automation, Proceedings, pp 117-123
2. Bazaz SA, Khan F, Shakoor RI (2011) Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor. Sensor Actuat a-Phys 167(1):44-53. doi: 10.1016/j.sna.2010.12.003
3. Beyeler F, Bell DJ, Nelson BJ, Sun Y, Neild A, Oberti S, Dual J (2006) Design of a micro-gripper and an ultrasonic manipulator for handling micron sized objects. In: 2006 IEEE/RSJ international conference on intelligent robots and systems, Vols 1-12, pp 772-777
4. Beyeler F, Neild A, Oberti S, Bell DJ, Sun Y, Dual J, Nelson BJ (2007) Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field. J Microelectromech Syst 16(1):7-15. doi: 10.1109/Jmems.2006.885853
5. Chang H, Zhao H, Xie J, Hao Y, Zhang F, Yuan W(2012) Design and fabrication of a rotary comb-actuated microgripper with high driving efficiency. In: 2012 IEEE 25th international conference on micro electro mechanical systems (MEMS), Jan. 29 2012-Feb. 2 2012, pp 1145-1148. doi: 10.1109/memsys.2012. 6170365
6. Chen T, Chen LG, Sun LN, Li XX (2009) Design and Fabrication of a Four-Arm-Structure MEMS Gripper. IEEE Trans Industr Electron 56(4):996-1004. doi: 10.1109/Tie.2008.2005147
7. Chen T, Sun LN, Chen LG, Rong WB, Li XX (2010) A hybrid-type electrostatically driven microgripper with an integrated vacuum tool. Sensor Actuat a-Phys 158(2):320-327. doi: 10.1016/j.sna.2010.01.001
8. Dario P, Carrozza MC, Benvenuto A, Menciassi A (2000) Micro-systems in biomedical applications. J Micromech Microeng 10(2):235-244
9. Kim CJ, Pisano AP, Muller RS, Lim MG (1990) Polysilicon microgripper. In: solid-state sensor and actuator workshop. 4th Technical Digest., IEEE, 4-7 Jun 1990, pp 48-51. doi: 10.1109/solsen.1990.109818
10. Okamura AM, Smaby N, Cutkosky MR (2000) An overview of dexterous manipulation. In: IEEE international conference on robotics and automation, Proceedings, ICRA '00, vol.251 pp 255-262. doi: 10.1109/robot.2000.844067
11. Tu C-C, Fanchiang K, Liu CH (2005) 1 x N rotary vertical micromirror for optical switching applications. In: Ayman E-F (ed), SPIE, pp 14-22
12. Volland BE, Heerlein H, Rangelow IW (2002) Electrostatically driven microgripper. Microelectron Eng 61-2:1015-1023
13. Yeh JA, Chen CN, Liu YS (2005) Large rotation actuated by in-plane rotary comb-drives with serpentine spring suspension. J Micromech Microeng 15(1):201-206. doi: 10.1088/0960-1317/15/1/028
14. Yeh JA, Huang JY, Chen CN, Hui CY (2006) Design of an electrostatic rotary comb actuator. J Microlith Microfab 5 (2). doi: 10.1117/1.2198532