A 1xN rotary vertical micro mirror for optical switching applications

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5719, Issue , 2005, Pages 14-22

  Tu, Ching Chen ^a   Fanchiang, Kuohao ^a   Liu, Cheng Hsien ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

MOEMS; Optical networks; Optical switch; SOG; Spin on Glass; Vertical micromirror

Indexed keywords

COMPUTER SIMULATION; DENSE WAVELENGTH DIVISION MULTIPLEXING; DOPPLER EFFECT; ELECTRIC POTENTIAL; FILMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL COMMUNICATION; OPTICAL SWITCHES; SELF ASSEMBLY;

OPTICAL NETWORKS; OPTICAL SWITCHING MIRRORS; SPIN-ON-GLASS (SOG); VERTICAL MICROMIRRORS;

MIRRORS;

EID: 21844453219     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.589810     Document Type: Conference Paper

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